“…Several types of LIPSS can be distinguished, depending on the laser processing parameters and the material, e.g., common Low Spatial Frequency LIPSS (LSFL) with a period of about the laser wavelength ( ), High Spatial Frequency LIPSS (HSFL) with a period well below the laser wavelength ( ), or even hexagonally arranged triangular nanopillars with an overall period close to the laser wavelength ( ) [ 25 , 28 ]. LIPSS can be processed on metals [ 8 , 9 , 10 , 18 , 19 , 20 , 29 ], semiconductors [ 12 , 21 , 25 , 28 ], dielectrics [ 30 ], ceramics [ 31 , 32 , 33 ] and polymers [ 34 , 35 , 36 , 37 ]. Large area processing of LIPSS is easily achieved in a one-step approach by scanning the focused laser beam in a meandering way across the sample surface.…”