The silicon sensors for the High Granularity Calorimeter of CMS

Abstract

The installation of the High-Luminosity Large Hadron Collider (HL-LHC) presents unprecedented challenges to experiments like the Compact Muon Solenoid (CMS) in terms of event rate, integrated luminosity and therefore radiation exposures. To cope with this new environment, new detectors will be installed during the CMS Phase 2 Upgrade, including the replacement of the calorimeter endcaps with the "High Granularity Calorimeter" (HGCAL), which contains silicon sensors and scintillators as active elements. The silicon sensors will be produced in an 8" wafer process, which is new for high-energy physics, so it demands extensive quality verification. A first batch of prototype sensors underwent electrical tests at the institutes of the CMS Collaboration. Testing revealed major problems with the mechanical stability of the thin backside protective layer, that were not seen in earlier 6" prototypes produced by a different backside processing method. Following these results, the HGCAL group introduced the concept of "frontside biasing", allowing testing of the sensors without exposing its backside, verified the applicability, and adapted the prototype design to apply this method in series production.

The CMS high granularity calorimeter for the High Luminosity LHC

“…Silicon sensors will be used in the region where radiation and occupancy levels are high, this means in the full electromagnetic and in the inner hadronic compartment (|η| > 2.4) [7,8]. The silicon sensors of the HGCAL will be exposed to a total radiation fluence ranging from 2 × 10 14 n eq /cm 2 to 1 × 10 16 n eq /cm 2 .…”

Process quality control strategy for the Phase-2 Upgrade of the CMS Outer Tracker and High Granularity Calorimeter

“…In contrast to the 300 µm and 200 µm thick wafers, which use a standard float zone process, the 120 µm thick wafers use an epitaxial production process. For further information about the HGCAL silicon sensors, see [7].…”