The Smoothing Effect of Si Layers in Multilayer Be/Al Mirrors for the 17- to 31-nm Range

Effect of low-temperature oxidation and heat treatment under vacuum on the Al–Be interdiffusion process

“…More details about the installation and parameters of beryllium and aluminium deposition can be found in the next work. 1,3 To investigate the mechanism of oxidation of the ultrathin films, including the analysis of their passivating properties, two-layer structures based on beryllium and aluminium (Si-sub./Be/Al and Si-sub./Al/Be) were synthesized. The top layer has a thickness of around 5 nm and the bottom layer has a thickness of around 40 nm.…”

“…More details about the installation and parameters of beryllium and aluminium deposition can be found in the next work. 1,3…”

“…In particular, multilayer periodic Be/Al structures are considered as far-reaching optics for diagnostic laboratories and solar plasma in the 17 to 31 nm range. [1][2][3] Recently, a thin beryllium layer has been considered as a barrier layer or as a protective coating layer on the top in metal/Be structures, 4 having useful applications in lithography. However, the effect of the deposition order, subsequent oxidation in air and thermal annealing under vacuum on the composition and the structure of the near-surface region of Be/Al multilayers has not been studied.…”

Periodic Multilayer for X-ray Spectroscopy in the Li K Range

“…In this context, Be-based periodic multilayers, i.e., multilayers in which one of the layers is a Be thin film, are of high interest [18][19][20]. In these works, the Be/Si/Al structures were studied for the 17-30 nm (40-75 eV) wavelength range.…”

“…Theoretically, a two-component Be/Al structure should have a high reflection. However, it was shown in [18][19][20] that such a structure has a high (up to 2.3 nm) interfacial roughness. The introduction of a thin (1-2 nm) silicon layer reduces the roughness by a factor of 1.5 to 2.…”