2019
DOI: 10.1063/1.5126485
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The source of volume beam-plasma formations based on a high-current non-self-sustained glow discharge with a large hollow cathode

Abstract: The paper considers a plasma source based on a low-pressure (≈1 Pa) high-current (up to 450 A) non-self-sustained glow discharge with a hollow cathode of volume ≈0.2 m3. The research data are presented on the ignition stability of the discharge, on its main parameters, and on the radial and azimuthal plasma inhomogeneity varying with the pressure, discharge voltage and current, and anode-to-cathode area ratio at a plasma density of ≈1018 m−3 and an ionization degree of ≈1%. The beam plasma formations synthesiz… Show more

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Cited by 29 publications
(8 citation statements)
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“…Principal layout of the experimental set-up: vacuum chamber unit (I),vacuum system (II), optical system (III), vacuum chamber (1), cathode unit (2), anode unit (3), sapphire window (4), turbomolecular pump (5), mass-spectrometry analysis system (6), monochromator (7), diaphragm (8), condenser lens (9), and experimental data processing system (10).…”
Section: Figurementioning
confidence: 99%
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“…Principal layout of the experimental set-up: vacuum chamber unit (I),vacuum system (II), optical system (III), vacuum chamber (1), cathode unit (2), anode unit (3), sapphire window (4), turbomolecular pump (5), mass-spectrometry analysis system (6), monochromator (7), diaphragm (8), condenser lens (9), and experimental data processing system (10).…”
Section: Figurementioning
confidence: 99%
“…High stability of the discharge conditions were achieved via the implementation of a long degassing cycle at the temperature of 700 K. The optical unit III consisted of the monochromator (7), the diaphragm (8), condenser lens (9), and a data processing system (10). Principal layout of the experimental set-up: vacuum chamber unit (I),vacuum system (II), optical system (III), vacuum chamber (1), cathode unit (2), anode unit (3), sapphire window (4), turbomolecular pump (5), mass-spectrometry analysis system (6), monochromator (7), diaphragm (8), condenser lens (9), and experimental data processing system (10).…”
Section: Figurementioning
confidence: 99%
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“…Many different gas-discharge systems have been developed in recent years for generating the low-temperature plasma used for surface processing. These systems differ in their operating gas pressure and processing regime (continuous or high frequency), as well as in the means employed for plasma generation and heating [6][7][8][9]. Most of these systems, however, are appropriate for the modification of external surfaces only.…”
Section: Introductionmentioning
confidence: 99%
“…The direction of activity associated with the hollow-cathode discharges is related, in particular, to the systems that use the plasma generated in the cathode cavity for the surface modification of metal and dielectric materials [3][4][5][6][7]. In such systems at a low gas pressure, the volume of the cathode cavity can achieve 0.5 m 3 [3,4].…”
Section: Introductionmentioning
confidence: 99%