The structure and hardness of magnetron sputtered Ti–Al–N thin films with low N contents (&lt;42 at.%)

Oliveira, J.C.; Manaia, A.; Dias, João Paulo; Cavaleiro, A.; Teer, D.G.; Taylor, Stuart

doi:10.1016/j.surfcoat.2005.11.051

“…The TiAlN coating hardness increased with an increasing nitrogen flow rate due to the presence of the AlN phase along with the TiN phase [5]; however, a further increase in the nitrogen flow rate increases the presence of the AlN phase, and it is not useful for the wear resistance application. The TiAlN coating hardness increased with an increasing nitrogen flow rate due to the increase of the nitrogen content [12]. The nitrogen content influenced the amorphous and crystalline phase formation and affected the coating hardness.…”

Section: Resultsmentioning

confidence: 99%

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

Budi¹,

Muhamad²,

Rahman³

2015

MST

1

0

View full text Add to dashboard Cite

The effect of the sputtering parameters on the mechanical tribology properties of Titanium Aluminum Nitride coating on the tungsten cabide insert tool in the dry turning of tool steel has been investigated. The coating was deposited using a Direct Current magnetron sputtering system with various substrate biases (-79 to -221 V) and nitrogen flow rates (30 to 72 sccm). The dry turning test was carried out on a Computer Numeric Code machine using an optimum cutting parameter setting. The results show that the lowest flank wear (~0.4 mm) was achieved using a Titanium Aluminum Nitride-coated tool that was deposited at a high substrate bias (-200 V) and a high nitrogen flow rate (70 sccm). The lowest flank wear was attributed to high coating hardness. AbstrakSifat Mekanik dan Tribologi Lapisan Titanium Aluminium Nitrida pada Perkakas Tungsten Karbida dalam Pemotongan Kering Baja. Telah dilakukan penelitian mengenai pengaruh parameter sputering terhadap sifat mekanik dan tribologi lapisan Titanium Aluminum Nitrida pada perkakas potong tungsten karbida dalam proses pemotongan turning kering baja perkakas. Deposisi lapisan tipis dilakukan menggunakan sistem sputtering magnetron dengan variasi tegangan substrate (-79 s/d -221 Volt) dan laju alir gas nitrogen (30 s/d 72 sccm). Pemotongan turning kering dilakukan menggunakan mesin bubut otomatis CNC dengan parameter pemotongan optimum. Hasil percobaan menunjukan bahwa aus sisi terendah (~0.4 mm) perkakas ditunjukan oleh lapisan Titanium Aluminum Nitrida yang dideposisikan pada tegangan substrat (-200 V) dan laju alir gas nitrogen (70 sccm) tinggi. Rendahnya aus sisi perkakas diakibatkan oleh tingginya nilai kekerasan lapisan.

show abstract

“…Therefore, the TiAlN coating hardness increases with an increase of Al content. The hardness of the TiAlN coating should increase with an increasing negative substrate bias due to the increasing Al content; however, there is an optimum Al content that can enhance the TiAlN hardness [12]. The hardness increases with an increasing Al concentration and reaches a maximum value at an Al concentration of 50 mol% [13].…”

Section: Resultsmentioning

confidence: 99%

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

Budi¹,

Muhamad²,

Rahman³

2015

MST

0

View full text Add to dashboard Cite

The effect of the sputtering parameters on the mechanical tribology properties of Titanium Aluminum Nitride coating on the tungsten cabide insert tool in the dry turning of tool steel has been investigated. The coating was deposited using a Direct Current magnetron sputtering system with various substrate biases (-79 to -221 V) and nitrogen flow rates (30 to 72 sccm). The dry turning test was carried out on a Computer Numeric Code machine using an optimum cutting parameter setting. The results show that the lowest flank wear (~0.4 mm) was achieved using a Titanium Aluminum Nitride-coated tool that was deposited at a high substrate bias (-200 V) and a high nitrogen flow rate (70 sccm). The lowest flank wear was attributed to high coating hardness. AbstrakSifat Mekanik dan Tribologi Lapisan Titanium Aluminium Nitrida pada Perkakas Tungsten Karbida dalam Pemotongan Kering Baja. Telah dilakukan penelitian mengenai pengaruh parameter sputering terhadap sifat mekanik dan tribologi lapisan Titanium Aluminum Nitrida pada perkakas potong tungsten karbida dalam proses pemotongan turning kering baja perkakas. Deposisi lapisan tipis dilakukan menggunakan sistem sputtering magnetron dengan variasi tegangan substrate (-79 s/d -221 Volt) dan laju alir gas nitrogen (30 s/d 72 sccm). Pemotongan turning kering dilakukan menggunakan mesin bubut otomatis CNC dengan parameter pemotongan optimum. Hasil percobaan menunjukan bahwa aus sisi terendah (~0.4 mm) perkakas ditunjukan oleh lapisan Titanium Aluminum Nitrida yang dideposisikan pada tegangan substrat (-200 V) dan laju alir gas nitrogen (70 sccm) tinggi. Rendahnya aus sisi perkakas diakibatkan oleh tingginya nilai kekerasan lapisan.

show abstract

“…This is presumably because of the slower deposition rate due to the lower Cr target current used to deposit CrSiN-3 (see Table 1). In addition, for coating deposition in a constant nitrogen flow rate environment, as is the case in this study, a smaller Cr target current is more vulnerable to the so-called target "poisoning effect" [24], which refers to the formation of a compound film on the target surface that leads to a significant reduction in the deposition rate [25].…”

Section: Page 8 Of 30mentioning

confidence: 93%

Factors governing the mechanical behaviour of CrSiN coatings: Combined nanoindentation testing and transmission electron microscopy

Wo¹,

Munroe²,

Li³

et al. 2012

Materials Science and Engineering: A

View full text Add to dashboard Cite

A c c e p t e d M a n u s c r i p t Highlights for manuscript "Factors governing the mechanical behaviour of CrSiN coatings: combined nanoindentation testing and transmission electron microscopy":  Influence of Si in CrSiN coatings on microstructure and mechanical behaviour. XTEM observation of microstructure before and after nanoindentation. Microstructure, residual stress, hardness are affected by Si content. Deformation mechanisms operated in the coatings explain their mechanical behaviour. *Highlights

show abstract

The structure and hardness of magnetron sputtered Ti–Al–N thin films with low N contents (<42 at.%)

Cited by 24 publications

References 6 publications

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

The Mechanical and Tribology Properties of Sputtered Titanium Aluminum Nitride Coating on the Tungsten Carbide Insert Tool in the Dry Turning of Tool Steel

Factors governing the mechanical behaviour of CrSiN coatings: Combined nanoindentation testing and transmission electron microscopy

Contact Info

Product

Resources

About