Abstract:Currently, the lateral electric field excited resonators are used for the creation of various sensors. We have recently proposed a new type of acoustic resonator called radial electric field excited disk acoustic resonator. The advantage of this type of resonator is its high sensitivity to mechanical and electrical boundary conditions on its free surface. This makes it possible to determine both the acoustic and electrical properties of a thin layer of material deposited on the free end of the resonator. In th… Show more
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