The study on the square pulse linear transformer driver (LTD)

Abstract

The square pulse output of Linear transformer driver (LTD) is of great interest for excimer lasers, where the efficiency can be greatly improved in this way. The design of square pulse output LTD within the single cavity was presented, then the influence of jitter and loop inductance on square pulse output was studied, it can be found that the higher the value of the jitter and loop inductance, the more the risetime of the voltage pulse, which hinders the shaping of the square pulse output. Then the method to change the square pulse width by varying the triggering times was presented, through the simulation, it is found that when the triggering interval is set to 15s, the square pulse characteristics of the voltage output are more obvious, the flat top is flat, and the pulse width is wider. The bricks within the single cavity can be designed by two methods, where the one is using the same sized capacitors, the other is using the different sized capacitors to synthesize a flat voltage pulse, the choice of the two methods should be based on the cost and requirements of the excimer laser, including the amplitude of the output voltage, the pulse width and the laser beam quality. The reference of designing the square pulse LTD can be provided by this paper