2020 IEEE XVIth International Conference on the Perspective Technologies and Methods in MEMS Design (MEMSTECH) 2020
DOI: 10.1109/memstech49584.2020.9109464
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The Studying of Hydrogen Diffusion Non-Stationary Processes Near a Crack in the Field of Heterogeneous Mechanical Tensions for the Encapsulated MEMS Devices

Winfried Auzinger
1
,
Roksolyana Stolyarchuk
2
,
Yaroslav Pelekh
3
et al.
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