The paper deals with the investigations of structural properties of Zn1−xMnxTe lms, which were fabricated under various deposition conditions using the thermal evaporation method in a closed volume. The surface morphology of the samples was studied, the phase analysis of their structures was performed, the elemental analysis of the lms and the crystal lattice constant were investigated. The texture perfection of the lms before and after copper ion implantation was evaluated.