The theory of improved resolution in stroboscopic SEM for EBIC-mode

Abstract

Idea of istrohoscopic principle in electron microscopy for the first time was described by ref. Now that is widely used in scanning electron microscopy(SEM)for the studies of dynamical effects caused by exciting electron beam in real materials. It was shown that the stroboscopic principle can be also used to improve the, spatial resolution in the SEM. This possibility was realized for CL-mode. In the present work the quantitative account of resolution inhancement of the EBIC SEM is given.Physical consideration of EBIC-processes in the material demonstrates the time-inertial properties of this processes. The above fact obliges to, work in the conventional scan case at bad resolution. Real method supposes the usage as a videosignal under pulse excitation of specimen by electron beam only the initial phase of rising induced current into the material. To solve this problem the induced current must be determined as a function of time at the condition of nonstationary excitation.