The top-down fabrication of a 3D-integrated, fully CMOS-compatible FET biosensor based on vertically stacked SiNWs and FinFETs

Buitrago, Elizabeth; Fernández-Bolaños, Montserrat; Rigante, Sara; Zilch, Christian; Schröter, Nicole; Nightingale, Adrian M.; Ionescu, Adrian M.

doi:10.1016/j.snb.2013.11.123

Cited by 29 publications

(18 citation statements)

References 47 publications

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“…Silicon-based multi-gate structures, commonly indicated as nanoribbons (SiNRs) and nanowires (SiNWs), have been proposed as bio and chemical sensors [ 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 ] . Although a few works indicate that improved macromolecular sensing can be achieved with smaller devices [ 30 ], no consensus has been reached on the effect of size reduction on pH sensitivity as well as the role of device technology, device layout, bias and signal readout [ 31 , 32 ].…”

Section: Introductionmentioning

confidence: 99%

Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint

et al. 2016

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The signal-to-noise ratio of planar ISFET pH sensors deteriorates when reducing the area occupied by the device, thus hampering the scalability of on-chip analytical systems which detect the DNA polymerase through pH measurements. Top-down nano-sized tri-gate transistors, such as silicon nanowires, are designed for high performance solid-state circuits thanks to their superior properties of voltage-to-current transduction, which can be advantageously exploited for pH sensing. A systematic study is carried out on rectangular-shaped nanowires developed in a complementary metal-oxide-semiconductor (CMOS)-compatible technology, showing that reducing the width of the devices below a few hundreds of nanometers leads to higher charge sensitivity. Moreover, devices composed of several wires in parallel further increase the exposed surface per unit footprint area, thus maximizing the signal-to-noise ratio. This technology allows a sub milli-pH unit resolution with a sensor footprint of about 1 µm2, exceeding the performance of previously reported studies on silicon nanowires by two orders of magnitude.

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Section: Introductionmentioning

confidence: 99%

Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint

et al. 2016

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“…The spacer near the source is removed so as to combine biomolecules with the cavity easily. The fabrication flow of GAA-NSFET has been reported in [33], [34], and the cavity formation has been demonstrated in [22]. So, according to above-mentioned literatures, the process flow of GAA-NSFET-based biosensor is shown in Fig.…”

Section: Device Structure and Simulation Setupmentioning

confidence: 99%

A Vertically Stacked Nanosheet Gate-All-Around FET for Biosensing Application

Liu

Han

et al. 2021

IEEE Access

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“…Such sensors fabricated underneath a microchannel can measure the pH of a flowing liquid. In a different study, a vertically stacked silicon nanowire and ISFET biosensor with suspended microchannels, fabricated in a CMOS‐compatible process on silicon on insulator (SOI) substrates, were created by Buitrago et al The minuscule dimensions of the sensors allowed the handling of nanolitre‐scale samples. PDMS with microfabricated channels delivered fluid to the sensors.…”

Section: Role Of Cmos In Microfluidicsmentioning

confidence: 99%

CMOS Enabled Microfluidic Systems for Healthcare Based Applications

et al. 2018

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additional parts, such as syringe pumps, control valves, and microscopes, which not only increase the complexity and cost of the system but also create a dependence of the system on a laboratorybased environment. Technology has now advanced so much that there are fully integrated sample-in-results-out chips for genetic analysis, [8] sensors that can detect a handful of molecules, and many other similar systems. [9] Complementary metal oxide semiconductor (CMOS) integrated LOC systems can be developed using CMOS technologies as sensors, signal conditioners, data processing circuitry, actuators, and wireless communication capabilities. [10][11][12][13][14][15][16][17] CMOS is a set of microfabrication and nanofabrication processes, which is used to manufacture semiconductor chips present inside computer, smartphone, or any electronic gadgets. Consequently, these chips are referred to as CMOS enabled or CMOS based chips. CMOS based chips can act as a processor, memory, and digital logic circuitry for data management. In this review, we will discuss how CMOS based devices have enabled both management of data from microfluidic devices as well as sensors and actuators to help complement the functionality of LOC devices. CMOS logics are simple to make, and consume little to no current in idle state. With the advancements in Moore's law we have seen the size of CMOS devices getting smaller and smaller allowing for more functionality to fit in a smaller area. [18] CMOS plays a significant role in the realization of portable and versatile microfluidic platforms by integrating them with microscale sensors, interfaces, and actuators to form autonomous hybrid systems. [10,12,16] Adding interface electronics to the same CMOS chip as sensors, actuators, data processing, and communication capabilities creates a universal platform for LOC technologies. Having signal amplification and noise removal right at the sensor interface without any signal loss makes the device output more accurate and sensitive, and also removes parasitic and mismatch errors. [1] By using CMOScompatible processes, it is possible to interface directly with the readout circuitry to form an integrated circuit system on a single chip. Signal acquisition from a large array of sensors to a single system requires a complex integration scheme, but CMOS microfabrication processes enable the integration of analogue multiplexers with biosensors on small dice. [19] CMOS also has the capability to actuate pumps and valves in microfluidic devices or to directly influence the fluid itself using electric With the increased global population, it is more important than ever to expand accessibility to affordable personalized healthcare. In this context, a seamless integration of microfluidic technology for bioanalysis and drug delivery and complementary metal oxide semiconductor (CMOS) technology enabled data-management circuitry is critical. Therefore, here, the fundamentals, integration aspects, and applications of CMOS-enabled microfluidic systems for affordable persona...

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The top-down fabrication of a 3D-integrated, fully CMOS-compatible FET biosensor based on vertically stacked SiNWs and FinFETs

Cited by 29 publications

References 47 publications

Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint

Multi-Wire Tri-Gate Silicon Nanowires Reaching Milli-pH Unit Resolution in One Micron Square Footprint

A Vertically Stacked Nanosheet Gate-All-Around FET for Biosensing Application

CMOS Enabled Microfluidic Systems for Healthcare Based Applications

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