The TriBeam system: Femtosecond laser ablation in situ SEM

Echlin, McLean P.; Straw, Marcus; Randolph, Steven; Filevich, Jorge; Pollock, Tresa M.

doi:10.1016/j.matchar.2014.10.023

Cited by 143 publications

(82 citation statements)

References 85 publications

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“…This process is shown schematically in Figure 1(a). 9,20 The stage on which the sample is mounted is composed of piezoelectric driven actuators (X, Y, Z, tilt) with 50 nm resolution that permit material removal by incrementally moving the sample surface into the scanning beam path, which is described in more detail elsewhere. 9,20 A Ti:sapphire gain medium femtosecond laser operating at 780 nm wavelength and 1 kHz repetition rate was used to ablate the sample surface in a FIB-SEM vacuum chamber at a pressure of 4 Â 10 À6 mbar.…”

Section: Methodsmentioning

confidence: 99%

“…During irradiation by a femtosecond pulse (typically 150 fs for a Ti:Sapphire laser), the photon energy is absorbed by the electronic structure to 20-500 nm within the sample surface. [20][21][22][23] The excited electron energy is then deposited after a time period of the order of 10 ps, during a thermalization event. Volumetric expansion of the highly excited surface region projects two waves: one compressive and, picoseconds later, a tensile wave that is reflected off the top surface of the expanding surface layer.…”

Section: Introductionmentioning

confidence: 99%

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Dislocation injection in strontium titanate by femtosecond laser pulses

Titus

Echlin

Gumbsch

et al. 2015

Journal of Applied Physics

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Femtosecond laser ablation is used in applications which require low damage surface treatments, such as serial sectioning, spectroscopy, and micromachining. However, dislocations are generated by femtosecond laser-induced shockwaves and consequently have been studied in strontium titanate (STO) using transmission electron microscopy (TEM) and electron backscatter diffraction analysis. The laser ablated surfaces in STO exhibit dislocation structures that are indicative of those produced by uniaxial compressive loading. TEM analyses of dislocations present just below the ablated surface confirm the presence of < 110 > dislocations that are of approximately 35 degrees mixed character. The penetration depth of the dislocations varied with grain orientation relative to the surface normal, with a maximum depth of 1.5 mu m. Based on the critical resolved shear stress of STO crystals, the approximate shockwave pressures experienced beneath the laser irradiated surface are reported

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Dislocation injection in strontium titanate by femtosecond laser pulses

Titus

Echlin

Gumbsch

et al. 2015

Journal of Applied Physics

Self Cite

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“…Other, destructive techniques combine optical or electron microscopy to serial sectioning [49,54,55]. Of course, 2D-only characterizations are also often used [56,57].…”

Section: Application To Raster Polycrystal Imagesmentioning

confidence: 99%

Optimal polyhedral description of 3D polycrystals: Method and application to statistical and synchrotron X-ray diffraction data

Quey

Renversade

2018

Computer Methods in Applied Mechanics and Engineering

199

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“…A femtosecond pulsed laser, which provides an ablation rate four to six orders of magnitude higher than a Ga + ion beam, 27 was used to reduce the time needed for the rough cut of the buckle cross section. The use of a femtosecond pulsed laser allows structuring of materials with ideally no heat affected zone as a result of the ultrashort pulse duration, but the shock wave of the ablation process can lead to the injection of dislocations.…”

Section: Materials and Experimentsmentioning

confidence: 99%

New Insights into Nanoindentation-Based Adhesion Testing

Kleinbichler

Pfeifenberger

Zechner

et al. 2017

JOM

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Nanoindentation, or instrumented indentation, is a versatile technique that is most often used to measure the elastic modulus and hardness of thin film systems. It can also be employed to measure thin film adhesion energies by producing well-defined areas of delamination. When combined with the proper mechanics-based model and characterization of the failing interfaces, nanoindentation-induced delamination is a powerful tool to quantify interfacial fracture. This article highlights new improvements to the technique that build off the work of Marshall and Evans in the 1980s. Indentation-induced delamination in systems with brittle films or substrates can be a balance between causing delamination and causing through-thickness or bulk fracture. Focused ion beam cross-sectioning and confocal laser scanning microscopy were used to characterize failing interfaces, additional fracture events were observed in the load-displacement curves, and the adhesion energy was determined using not only symmetric, ideally shaped buckles, but also irregular-shaped and half-delaminated buckles.

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The TriBeam system: Femtosecond laser ablation in situ SEM

Cited by 143 publications

References 85 publications

Dislocation injection in strontium titanate by femtosecond laser pulses

Dislocation injection in strontium titanate by femtosecond laser pulses

Optimal polyhedral description of 3D polycrystals: Method and application to statistical and synchrotron X-ray diffraction data

New Insights into Nanoindentation-Based Adhesion Testing

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