The two-dimensional micro conveyer: principles and fabrication process of the actuator

Nakazawa, Hiroyuki; Watanabe, Yasumasa; Morita, Osamu; Edo, Masaharu; Yonezawa, E.

doi:10.1109/sensor.1997.613574

Cited by 32 publications

(22 citation statements)

References 4 publications

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“…It results in an inbetween to the macro-world, and 2-10 microns dimensions. This can be handled by electromagnetic actuation [9], [10], [11], [12].…”

Section: Advantages Of Electromagnetic Actuation and Down Scalingmentioning

confidence: 99%

Electromagnetic remote control and downscaling advantages and examples for MOEMS

et al. 2001

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Electromagnetic actuation is applied to MOEMS for industrial applications requiring large and long-range forces. Advantages and drawbacks are outlined while down scaling laws are discussed. Technological improvements and new available materials bring to much smaller dimensions, the limit between Electromagnetism and Electrostatics. Remote control and bi-stability are unique characteristics of electromagnetic actuation. The importance of remote control is stressed so as to allow easy tests and optimisation with no technological compatibility problem. These advantages are illustrated on three different electromagnetic MOEMS, developed in LIMMS, a Franco-Japanese research Laboratory based in Tokyo. The first is a resonant 1D magnetic scanner, the second is a magnetic bi-stable matrix array of optical micro-switches and the last is a remarkable application of the properties of thick Magnetostrictive thin layers to a 2D scanner.

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“…It results in an inbetween to the macro-world, and 2-10 microns dimensions. This can be handled by electromagnetic actuation [9], [10], [11], [12].…”

Section: Advantages Of Electromagnetic Actuation and Down Scalingmentioning

confidence: 99%

Electromagnetic remote control and downscaling advantages and examples for MOEMS

et al. 2001

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“…It is initially pointed out by Fujita et al, [1] with an example of a ciliary motion system composed of numerous identical actuators. Many works using the same concept performing a conveyance task have been reported as well, including pneumatic micro actuators [2], electro wetting-on-dielectric-actuated aqueous droplets [3], polyimide joint actuators [4] or electromagnetic forces [5], [6]. The micro conveyor system using arrayed actuators often consists of M×N rectangular identical elementary cells in which each of the cell can individually generate actuation force.…”

Section: Introductionmentioning

confidence: 99%

Development of a control circuit for an electromagnetic smart surface

Rosalinda

Khan

Petit

et al. 2015

2015 16th International Conference on Research and Education in Mechatronics (REM)

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Arrayed micro actuators are increasingly used with various kinds of driving methods, especially to realize planar conveyance tasks. Using this concept, the flexible micro electromagnetic conveyor system presented in this paper has been developed. The presented system consists of arrayed elementary cells which can move a mobile pallet placed on its top side. To ensure long range motion flexibility, each cell must be individually controlled to manage the movement of the pallet by selecting the corresponding cells. A control strategy is then needed while avoiding a huge number of wires and power supplies required by each cell. This paper presents a control circuit using a row/column addressing scheme designed to control the presented device. Experimental tests have been done to validate the proposed control circuit design. The results show that the functioning of the device remains the same with the activation of the selected cells only thanks to the developed control circuit.

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“…Therefore, arranging microactuators in array configurations to allow the actuators working together becomes a popular approach, which not only can increase the total force and load capacity of the micro-conveyance systems, but also take advantage in MEMS batch fabrication process. Microactuators developed for microconveyance systems can be classified into different actuation schemes, such as thermal bimorphs (Ataka et al 1993), air jets (Konishi and Fujita 1994;Pister et al 1990), torsional resonators (Mita et al 1997), electromagnetic (Liu et al 1995;Nakazawa et al 1997), piezoelectric (Furuhata et al 1991), and electrostatic (Edo et al 1999). The ciliary motion principle proposed by Ataka et al (1993) used thermal bimorph polyimide legs which were actuated asynchronously to provide propulsion for micro-objects.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of an electrothermal microactuator for multi-level conveying

Hsu

2005

Microsyst Technol

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During the past years, a variety of microactuators developed for micro-conveyors have been presented. However, such micro-conveyors can only provide conveying motion in a single plane. Here an electrothermally driven microactuator with a capability of adjustable height is proposed, which may act as a basic unit for multi-level conveyors. This microactuator is based on the principle of thermal bimorph actuation with two long conveying fingers to exert out-of-plane bending motions in the transversal direction, which are connected and lifted by an initially curved height adjuster in the longitudinal direction. The devices can provide conveyance of micro-objects between two plane levels of different heights. The testing results show that the two fingers and a height adjuster can be actuated simultaneously and individually with little thermal crosstalk. The proposed device with a dimension of 900·100·4.5 lm 3 can provide 5 lm vertical displacements by the height adjuster at 1 V and 18 lm lateral displacements by the conveying finger at 2 V. Simulations by finite-element program ANSYS 5.7 have been performed and widely match with testing results.

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The two-dimensional micro conveyer: principles and fabrication process of the actuator

Cited by 32 publications

References 4 publications

Electromagnetic remote control and downscaling advantages and examples for MOEMS

Electromagnetic remote control and downscaling advantages and examples for MOEMS

Development of a control circuit for an electromagnetic smart surface

Design and fabrication of an electrothermal microactuator for multi-level conveying

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