The ultra fine dynamics of MEMS as revealed by the Polytec micro system analyzer

Lawrence, Eric M.; Rembe, Christian; Boedecker, Sebastian; Zhang, Huantong

doi:10.1117/12.646556

Cited by 7 publications

(3 citation statements)

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“…The mechanical resonance measurement in Fig. 6a is the most typical application of this system 33 . The mechanical resonance measurements in Fig.…”

Section: Experiments Setupmentioning

confidence: 99%

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Ge,

Cretu

2023

Microsyst Nanoeng

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The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring. Polymer piezoelectric MEMS accelerometers offer the merits of heavy-metal-free structure material and simple microfabrication flow. More importantly, polymeric piezoelectric MEMS accelerometers may be the basis of novel applications, such as fully organic inertial sensing microsystems using polymer sensors and organic integrated circuits. This paper presents a novel polymer piezoelectric MEMS accelerometer design using PVDF films. A simple and rapid microfabrication flow based on laser micromachining of thin films and 3D stereolithography was developed to fabricate three samples of this design. During proof-of-concept experiments, the design achieved a sensitivity of 21.82 pC/g (equivalent open-circuit voltage sensitivity: 126.32 mV/g), a 5% flat band of 58.5 Hz, and a noise density of 6.02 µg/√Hz. Thus, this design rivals state-of-the-art PZT-based counterparts in charge sensitivity and noise density, and it surpasses the performance capabilities of several commercial MEMS accelerometers. Moreover, this design has a 10-times smaller device area and a 4-times larger flat band than previous state-of-the-art organic piezoelectric MEMS accelerometers. These experimentally validated performance metrics demonstrate the promising application potential of the polymeric piezoelectric MEMS accelerometer design presented in this article.

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“…The mechanical resonance measurement in Fig. 6a is the most typical application of this system 33 . The mechanical resonance measurements in Fig.…”

Section: Experiments Setupmentioning

confidence: 99%

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Ge,

Cretu

2023

Microsyst Nanoeng

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“…Thanks to the advances in digital Doppler signal demodulation, the accuracy of the heterodyne interferometer has been greatly improved compared with the ones using analog demodulation. The measurement error is typically less than 1% [41], which ensures the accuracy of the imaging results.…”

Section: Performance Characterizationmentioning

confidence: 99%

Non-contact Photoacoustic Imaging Using A Commercial Heterodyne Interferometer

Tian

Wang

et al. 2016

IEEE Sensors J.

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Most current photoacoustic imaging (PAI) systems employ piezoelectric transducers to receive photoacoustic signals, which requires coupling medium to facilitate photoacoustic wave propagation and are not favored in many applications. Here, we report an all-optical non-contact PAI system based on a commercial heterodyne interferometer working at 1550 nm. The interferometer remotely detects ultrasound-induced surface vibration and does not involve any physical contact with the sample. The theoretically predicated and experimentally measured noise equivalent detection limits of the optical sensor are about 4.5 and 810 Pa over 1.2 MHz bandwidth. Using a raster-scan PAI system equipped with the non-contact design, stereotactic boundaries of an artificial tumor in a pig brain were accurately delineated. The non-contact design also enables the tomographic PAI of biological tissue samples in a non-invasive manner. The preliminary results and analyses reveal that the heterodyne interferometer-based non-contact PAI system holds good potential in biomedical imaging.

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“…To overcome these drawbacks, an Nd:YAG pulse laser system has been developed to generate the ultrasonic waves. This pulsed laser could provide many advantages such as fast wave generation with low pulse energy, good detection capability in complex structures, and a high spatial resolution [ 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Comparison Study between RMS and Edge Detection Image Processing Algorithms for a Pulsed Laser UWPI (Ultrasonic Wave Propagation Imaging)-Based NDT Technique

Lee

Zhang

et al. 2017

Sensors

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In this study, a non-contact laser ultrasonic propagation imaging technique was applied to detect the damage of plate-like structures. Lamb waves were generated by an Nd:YAG pulse laser system, while a galvanometer-based laser scanner was used to scan the preliminarily designated area. The signals of the structural responses were measured using a piezoelectric sensor attached on the front or back side of the plates. The obtained responses were analyzed by calculating the root mean square (RMS) values to achieve the visualization of structural defects such as crack, corrosion, and so on. If the propagating waves encounter the damage, the waves are scattered at the damage and the energy of the scattered waves can be expressed by the RMS values. In this study, notch and corrosion were artificially formed on aluminum plates and were considered as structural defects. The notches were created with different depths and angles on the aluminum plates, and the corrosion damage was formed with different depths and areas. To visualize the damage more clearly, edge detection methodologies were applied to the RMS images and the feasibility of the methods was investigated. The results showed that most of the edge detection methods were good at detecting the shape and/or the size of the damage while they had poor performance of detecting the depth of the damage.

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The ultra fine dynamics of MEMS as revealed by the Polytec micro system analyzer

Cited by 7 publications

References 0 publications

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

Non-contact Photoacoustic Imaging Using A Commercial Heterodyne Interferometer

Comparison Study between RMS and Edge Detection Image Processing Algorithms for a Pulsed Laser UWPI (Ultrasonic Wave Propagation Imaging)-Based NDT Technique

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