The use of Langmuir Probe Methods for Plasma Diagnostic in Middle Pressure Discharges

David, P.; Šı́cha, M.; Tichý, M.; Kopiczynski, T.; Zakrzewski, Z.

doi:10.1002/ctpp.2150300202

Cited by 17 publications

(11 citation statements)

References 19 publications

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“…In this theory the collisional coefficient which expresses the influence of ion scattering due to collisions is valid if the number of collisions in the probe sheath does not exceed several units. This theory is reviewed by DAVID et al [15].…”

Section: The Used Methods Of Number Density Determinationmentioning

confidence: 96%

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Langmuir Probe Determination of Charged Particle Number Density in a Flowing Afterglow Plasma

Chudacek

Kudrna

Glosı́k

et al. 1995

Contrib. Plasma Phys.

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Experimental study of the electron and ion density determined by Langmuir probe is presented. The probe data have been obtained on FALP apparatus for electron (and ion) number densities ranging from 10" m-3 to loL6 at electron temperatures equal to room temperature and also roughly ten times higher and at neutral pressures from 60 Pa to 150 Pa.The number densities of electrons for all measured probe data have been deduced from the electron current to the probe at the space potential and also by means of OML method from the electron current measured for positive probe with respect to the space potential. In the paper it is shown that in the flowing afterglow plasma the values of the electron density determined according both methods are in a good agreement and it is possible to take them as the reference number density for comparison with apparent ion densities obtained from the ion current.The number densities obtained from the ion currents in the ion accelerating region (negative probe with respect to the space potential) according to different applicable probe theories have been compared with reference value. It is found that the best agreement between the number densities evaluated from the electron current and from the ion current gives the theory of ion collection by TICHL et al. [16], which takes into account the collisions of ions with neutrals in the space charge sheath around the probe provided that the conditions correspond to the OML regime.

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Section: The Used Methods Of Number Density Determinationmentioning

confidence: 96%

“…The detailed summary of these theories is described by DAVID et al in [15]. The model of ion collection at the presence of collisions which combines both above mentioned collisional theories is presented in [16].…”

Section: Introductionmentioning

confidence: 99%

Langmuir Probe Determination of Charged Particle Number Density in a Flowing Afterglow Plasma

Chudacek

Kudrna

Glosı́k

et al. 1995

Contrib. Plasma Phys.

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“…42,43 We also emphasize that a proper use of collision correcting factors demands precise measurement of the gas temperature. Either Zakrzewski and Kopiczynski or Talbot and Sicha theory takes into account these two phenomena by using two opposite correcting factors.…”

Section: Discussionmentioning

confidence: 99%

Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge

Rousseau

Teboul²,

Béchu

2005

Journal of Applied Physics

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International audienceThis paper is devoted to the validation of Langmuir probe technique by microwave autointerferometry in a surface wave discharge at medium pressure (from 0.1 up to 10 Torr). Temperatures of neutrals, obtained from Rayleigh scattering, and electrons, given by double probe measurements, have been used to estimate the mean free path and the sheath length. Hence, the number of collisions in the sheath has been obtained. We have verified that two different phenomena occur in the sheath, while the pressure increases. These phenomena are depicted, in literature, as two different coefficients used to modify the value of the noncollisional current of Laframboise. Coefficients given by various authors have been investigated with accuracy knowing the number of collisions in the sheath. Very good agreements are obtained between Zakrzewski and Kopiczynski theory and autointerferometry measurements which are unaffected by collisional phenomena

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“…The ion current can be removed from the probe current by using the below mentioned empirical formula (Nuhn & Peter 1977; David et al. 1990) …”

Section: Principles Of the Evaluation Procedures Of Langmuir Probe – mentioning

confidence: 99%

Langmuir probe in collisionless and collisional plasma including dusty plasma

et al. 2017

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Measurements of local plasma parameters in dusty plasma are crucial for understanding the physics issues related to such systems. The Langmuir probe, a small electrode immersed in the plasma, provides such measurements. However, designing of a Langmuir probe system in a dusty plasma environment demands special consideration. First, the probe has to be miniaturized enough so that its perturbation on the ambient dust structure is minimal. At the same time, the probe dimensions must be such that a well-defined theory exists for interpretation of its characteristics. The associated instrumentation must also support the measurement of current collected by the probe with high signal to noise ratio. The most important consideration, of course, comes from the fact that the probes are prone to dust contamination, as the dust particles tend to stick to the probe surface and alter the current collecting area in unpredictable ways. This article describes the design and operation of a Langmuir probe system that resolves these challenging issues in dusty plasma. In doing so, first, different theories that are used to interpret the probe characteristics in collisionless as well as in collisional regimes are discussed, with special emphasis on application. The critical issues associated with the current–voltage characteristics of Langmuir probe obtained in different operating regimes are discussed. Then, an algorithm for processing these characteristics efficiently in presence of ion-neutral collisions in the probe sheath is presented.

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The use of Langmuir Probe Methods for Plasma Diagnostic in Middle Pressure Discharges

Cited by 17 publications

References 19 publications

Langmuir Probe Determination of Charged Particle Number Density in a Flowing Afterglow Plasma

Langmuir Probe Determination of Charged Particle Number Density in a Flowing Afterglow Plasma

Comparison between Langmuir probe and microwave autointerferometry measurements at intermediate pressure in an argon surface wave discharge

Langmuir probe in collisionless and collisional plasma including dusty plasma

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