1973
DOI: 10.1149/1.2403637
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The Use of Rutherford Backscattering to Study the Behavior of Ion-Implanted Atoms During Anodic Oxidation of Aluminum: Ar, Kr, Xe, K, Rb, Cs, Cl, Br, and l

Abstract: It is shown that from the energy spectra of He ions backscattered from aluminum, recorded before and after anodic oxidation, the thickness of the oxide films and the positions of ion‐implanted foreign atoms within the films can be determined. Information on the composition and uniformity of the films is also obtained. The scope, limitations, and precision of the method are predictable and are discussed. As model experiments the behavior of ion‐implanted noble gases was studied. The results agree with previous … Show more

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Cited by 253 publications
(132 citation statements)
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“…The transport number of cations in anodic Al 2 O 3 is 0.4 [27,28] and that in amorphous anodic ZrO 2 has been predicted to be 0.15 [9]. Assuming linear change in the transport number of cations with alloy composition [7], the transport number of cations of 0.21 is predicted for the anodic film on the Zr-26 at.% Al alloy.…”
Section: +mentioning
confidence: 94%
“…The transport number of cations in anodic Al 2 O 3 is 0.4 [27,28] and that in amorphous anodic ZrO 2 has been predicted to be 0.15 [9]. Assuming linear change in the transport number of cations with alloy composition [7], the transport number of cations of 0.21 is predicted for the anodic film on the Zr-26 at.% Al alloy.…”
Section: +mentioning
confidence: 94%
“…Thus, it is concluded that radiation damage from ion implantation is a minor influence on the transport processes. The results of Brown and MacIntosh, 116 Skeldon et al, 96 and Shimizu et al 117 show that Cl − is mobile in an Al oxide film and that the Cl − moves toward the oxide/metal interface under an anodic potential.…”
Section: Chloride Mobility In the Oxidementioning
confidence: 98%
“…Anodizing of aluminium under the present conditions is known to occur at an eciency approaching 100%, with ®lm growth proceeding at both the ®lm/ electrolyte and metal/®lm interfaces due to co-operative transport of Al 3+ and O 2À ions, respectively [9]. Boron species, which are immobile in the ®lm, are found throughout the thickness of material formed at the ®lm/electrolyte interface; this outer layer constitutes about 40% of the ®lm thickness [10].…”
Section: Discussionmentioning
confidence: 81%