2013
DOI: 10.1016/j.ultramic.2013.05.022
|View full text |Cite
|
Sign up to set email alerts
|

The use of STEM imaging to analyze thickness variations due to electromigration-induced mass transport in thin polycrystalline nanobridges

Abstract: Highlights We analyzed the electromigration-induced thickness variations of thin polycrystalline films. Small camera length is required to minimize the effect of diffraction contact in STEM imaging

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
5
0

Year Published

2013
2013
2020
2020

Publication Types

Select...
5
1

Relationship

3
3

Authors

Journals

citations
Cited by 6 publications
(5 citation statements)
references
References 13 publications
0
5
0
Order By: Relevance
“…The bridge shown has a length of 1000 nm and a width of 500 nm. The STEM images were obtained with a medium camera length (117 mm) in order to record images of a good quality with a minimum of diffraction contrast, and thus to allow a contrast change to be attributed to a change in thickness [12]. The frame rate of the STEM footage was selected at 3 fps to achieve an acceptable image quality for the selected camera length.…”
Section: Resultsmentioning
confidence: 99%
“…The bridge shown has a length of 1000 nm and a width of 500 nm. The STEM images were obtained with a medium camera length (117 mm) in order to record images of a good quality with a minimum of diffraction contrast, and thus to allow a contrast change to be attributed to a change in thickness [12]. The frame rate of the STEM footage was selected at 3 fps to achieve an acceptable image quality for the selected camera length.…”
Section: Resultsmentioning
confidence: 99%
“…Using a high-angle annular dark field detector the contrast enhancement was achieved due to suppression of diffraction contrast while massthickness contrast leads to sufficient difference between high intensity NPs separated by almost no-intensity gaps. [32] The size distribution analysis was done by using the free ImageJ software. [33] SCO NPs were deposited using a stamping technique as previously published.…”
Section: Methodsmentioning
confidence: 99%
“…3(a)-(e) shows snapshots of the real-time STEM movie recorded during bias-ramping at T s ¼ 420 K. To identify thickness changes due to Pt displacement, high-angle STEM imaging was used, which allowed the visualisation of material transfer, i.e. the thicker the area, the brighter it appears in the STEM image [12]. Six voltage loops with the maximum voltages in the range of 500-850 mV were applied in a row.…”
Section: Resultsmentioning
confidence: 99%
“…Such studies become more important because of the trend to downscale metallic contact lines to nanometer sizes in devices. To our knowledge, the influence of substrate temperature on bridge morphology during electromigration has not yet been reported, only results concerning room temperature (RT) and liquid nitrogen temperature (around 100 K) [2,11,12]. We report here on in situ TEM results of electromigration in Pt nanobridges at substrate temperatures ranging from 100 K to 660 K.…”
Section: Introductionmentioning
confidence: 94%