2012
DOI: 10.1016/j.diamond.2012.01.028
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The valuable role of renucleation rate in ultrananocrystalline diamond growth

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Cited by 23 publications
(25 citation statements)
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“…Extensive research has been conducted on the polycrystalline growth of NCD on various materials such as NaCl and Silicon 9 , 10 ; however, there is little in reported literature in regards to spatially localized NCD growth on SCD substrates. Typically in heteroepitaxial MPCVD NCD growth processes, it is required that the substrate be prepared by seeding its surface with nanocrystalline diamond crystallites that act as growth catalysts for the NCD film 11 , 12 . This is achieved by sonicating the substrate in a colloidal nanodiamond solution, whereby nanocrystalline particles attach to the substrate surface and in turn act as initial growth sites.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Extensive research has been conducted on the polycrystalline growth of NCD on various materials such as NaCl and Silicon 9 , 10 ; however, there is little in reported literature in regards to spatially localized NCD growth on SCD substrates. Typically in heteroepitaxial MPCVD NCD growth processes, it is required that the substrate be prepared by seeding its surface with nanocrystalline diamond crystallites that act as growth catalysts for the NCD film 11 , 12 . This is achieved by sonicating the substrate in a colloidal nanodiamond solution, whereby nanocrystalline particles attach to the substrate surface and in turn act as initial growth sites.…”
Section: Introductionmentioning
confidence: 99%
“…In polycrystalline films grown by seeding techniques, the final NCD film is highly dependent on the initial distribution of the attached nano-seeds to the substrate. In order to achieve thick and smooth NCD films, plasma conditions and CVD growth parameters must be altered to promote greater re-nucleation by disrupting grain growth which reduces the crystallite size 11 14 . Films grown with high re-nucleation rates that yield smaller grain sizes (<10 nm) are referred to as ultrananocrystalline, and these films’ final grain size is no longer influenced by the overall thickness of the grown film.…”
Section: Introductionmentioning
confidence: 99%
“…Reactor pressure and the substrate temperature were kept at 4 kPa and 680°C, respectively, with a gas mixture composed of 80% Ar, 19% H 2 and 1% CH 4 in a total flow of 150 sccm. In general, UNCD has been deposited at Ar concentration above 90% [4,22,23], however, with 80% Ar, B-UNCD could be obtained on RVC matrix. The boron doping was performed by additional hydrogen line passing through a bubbler containing B 2 O 3 dissolved in methanol with B/C ratio of 30 000 ppm.…”
Section: Methodsmentioning
confidence: 98%
“…Our experiments call into question the idea that, under the growth conditions of a nanocrystalline film, renucleation occurs on the growth surfaces of any orientation [20]. On the {100} face of SC substrate, homoepitaxial growth in the step bunching regime occurs for a long (5 min) period of time (Figure 1c It is believed that renucleation processes dominate under low power density or high methane concentration [11].…”
Section: Diamond Deposition On Low-index Facets Of the Single Crystalmentioning
confidence: 99%