The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

Čermák, Martin; Kelarová, Štěpánka; Jurmanová, Jana; Kührová, Pavlína; Buršı́ková, Vilma

doi:10.1016/j.diamond.2022.109245

Cited by 5 publications

(2 citation statements)

References 88 publications

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“…Another group of well-known polymer-like layers are organosilicon (SiO x C y H z ) plasma polymers [51,52]. A combination of these two types of materials in films with a gradient structure may serve as protective coatings on plastic materials with a gradient change from a softer transparent polymer-like structure with similar mechanical properties as polycarbonate to a harder but more absorbing polymer-like a-C:H/SiO x film structure [53][54][55]. The presented work uses this type of gradient polymer-like layers to illustrate the novel approach to optical characterization.…”

Section: Sample Preparationmentioning

confidence: 99%

Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

et al. 2023

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In this study, a novel approach for characterizing the optical properties of inhomogeneous thin films is presented, with a particular focus on samples exhibiting absorption in some part of the measured spectral range. Conventional methods of measuring the samples only from the film side can be limited by incomplete information at the lower boundary of the film, leading to potentially unreliable results. To address this issue, depositing the thin films onto non-absorbing substrates to enable measurements from both sides of the sample is proposed. To demonstrate the efficacy of this approach, a combination of variable-angle spectroscopic ellipsometry and spectrophotometry at near-normal incidence was employed to optically characterize three inhomogeneous polymer-like thin films. The spectral dependencies of the optical constants were modeled using the Kramers–Kronig consistent model. It was found that it is necessary to consider thin, weakly absorbing transition layers between the films and the substrates. The obtained results show excellent agreement between the fits and the measured data, providing validation of the structural and dispersion models, as well as the overall characterization procedure. The proposed approach offers a method for optically characterizing a diverse range of inhomogeneous thin films, providing more reliable results when compared to traditional one-sided measurements.

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Section: Sample Preparationmentioning

confidence: 99%

Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

et al. 2023

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“…This allows for a continuous transition from a softer, transparent material with excellent substrate adhesion to a harder, albeit more absorptive material. Through this controlled process, it becomes possible to grow the protective coatings that exhibit very good adhesion to the substrate [10] , [11] , [12] .…”

Section: Introductionmentioning

confidence: 99%

Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

Dvořák,

Vohánka,

Buršíková

et al. 2024

Heliyon

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Optical properties of crystalline materials based on AgCl0.25Br0.75 – TlCl0.74Br0.26 and AgCl0.25Br0.75 – TlBr0.46I0.54 systems

Yuzhakova,

Lvov,

Salimgareev

et al. 2024

Ceramics International

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The wide range optical spectrum characterization of the silicon and oxygen doped diamond like carbon inhomogeneous thin films

Cited by 5 publications

References 88 publications

Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

Optical Characterization of Inhomogeneous Thin Films Deposited onto Non-Absorbing Substrates

Optical characterization of inhomogeneity of polymer-like thin films arising in the initial phase of plasma-enhanced chemical vapor deposition

Optical properties of crystalline materials based on AgCl0.25Br0.75 – TlCl0.74Br0.26 and AgCl0.25Br0.75 – TlBr0.46I0.54 systems

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