The α‐β circular scanning with large range and low noise

Liu, J.; You, Xiaoyu; Wang, Y.; Gu, Kang; Liu, C.; Tan, Jun

doi:10.1111/jmi.12515

Cited by 9 publications

(7 citation statements)

References 17 publications

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“…Consequently, insufficient use of the field of view or data redundancy may occur. 50 Moreover, the use of a sawtooth wave leads to shock and damage to the GM scanner in the returning operation. Alternatively, α-β circular scanning 50 is realised using two sinusoidal signals with a constant phase difference of π/2.…”

Section: Scan Patternsmentioning

confidence: 99%

“…50 Moreover, the use of a sawtooth wave leads to shock and damage to the GM scanner in the returning operation. Alternatively, α-β circular scanning 50 is realised using two sinusoidal signals with a constant phase difference of π/2. This scanning pattern fully uses the scanning field and avoids redundant scanning by covering the complete field of view.…”

Section: Scan Patternsmentioning

confidence: 99%

“…Nevertheless, when raster scanning is used in an optical imaging system, its rectangular scanning field does not match the circular field of view. Consequently, insufficient use of the field of view or data redundancy may occur 50 . Moreover, the use of a sawtooth wave leads to shock and damage to the GM scanner in the returning operation.…”

Section: Scanning and Distortionmentioning

confidence: 99%

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3D microscopy in industrial measurements

You

Liu

et al. 2022

Journal of Microscopy

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Quality control is essential to ensure the performance and yield of microdevices in industrial processing and manufacturing. In particular, 3D microscopy can be considered as a separate branch of microscopic instruments and plays a pivotal role in monitoring processing quality. For industrial measurements, 3D microscopy is mainly used for both the inspection of critical dimensions to ensure the design performance and detection of defects for improving the yield of microdevices. However, with the progress of advanced manufacturing technology and the increasing demand for high‐performance microdevices, 3D microscopy has ushered in new challenges and development opportunities, such as breakthroughs in diffraction limit, 3D characterisation and calibrations of critical dimensions, high‐precision detection and physical property determination of defects, and application of artificial intelligence. In this review, we provide a comprehensive survey about the state of the art and challenges in 3D microscopy for industrial measurements, and provide development ideas for future research. By describing techniques and methods with their advantages and limitations, we provide guidance to researchers and developers about the most suitable technique available for their intended industrial measurements.

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Section: Scan Patternsmentioning

confidence: 99%

Section: Scan Patternsmentioning

confidence: 99%

Section: Scanning and Distortionmentioning

confidence: 99%

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3D microscopy in industrial measurements

You

Liu

et al. 2022

Journal of Microscopy

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“…Because the sinusoidal waveform is a single tone, the sinusoidal‐raster scanning method can eliminate the undesirable vibration of the scanner. In addition, there are also other actions, such as Lissajous scans (Bazaei et al ., ; Wu, ; Yong et al ., ), spiral‐scans (Mahmood & Moheimani, ; Rana et al ., ; Sang et al ., ) and cycloid scans (Yong et al ., ; Liu et al ., ; Ulcinas & Vaitekonis, ). These methods are demonstrated to be effective for high‐speed AFM.…”

Section: Introductionmentioning

confidence: 97%

Adaptive velocity‐dependent proportional‐integral controller for high‐speed atomic force microscopy

Liu

Wang

et al. 2019

Journal of Microscopy

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High-speed atomic force microscopy (AFM) has been rapidly developed in recent years. To reduce the oscillation of the scanner, a single-tone sinusoidal wave is widely used as a scanning wave rather than a triangular wave in high-speed AFM. However, the sinusoidal wave is nonlinear, resulting in a nonconstant relative linear velocity between the sample and the tip while scanning in the x-direction. If a traditional proportional-integral controller is still used as a feedback controller in the z-direction, the control errors will be enormous. Therefore, the paper proposes a new adaptive velocitydependent proportional-integral controller. The relationship between the proportional-integral parameters and the linear velocity is achieved by fitting the experimental results. The adaptive and traditional controllers are compared against each other in some examples. The experiments demonstrate that the adaptive controller decreases the control errors in the z-direction to a half, which provides more precise AFM images.

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“…Risley prism scanning systems with rotational elements have the major advantage of a much faster 2D scan -in comparison to the common raster scanning with GSs [19] or to the most recent spiral scanning [20,21]. The competitor of Risley prisms seems to be Lissajous scanning [22,23], but the latter is still done with GSs, therefore with oscillatory mirrors that have the issues of stop-and-turn portions of their scanning functions [5].…”

Section: Introductionmentioning

confidence: 99%

Experimental versus simulated secondary scan patterns produced by a pair of Risley prisms

Dîmb,

Duma

2023

Modeling Aspects in Optical Metrology IX

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Devices with a pair of rotational Risley prisms are one of the most common and fastest 2D laser scanners. The present work builds on the novel, graphical method we have developed [Proc. of the Romanian Acad. Series A 19, 2018; Applied Sciences 11, 2021; Symmetry 15, 2023] to simulate and study scan patterns of such devices. Our method has the advantage to generate exact patterns, in contrast to approximate methods. Also, it is easy to use, in contrast to analytical methods. This graphical approach allows for fulfilling the aim of this work: to utilize ghost rays (which are usually avoided in optical systems) in order to increase the fill factor (FF) of scan patterns. Thus, secondary scan patterns are produced and studied. A radiometric threshold is set for such patternsto maintain the emerging flux from the prisms above a certain minimum level. With this condition, three useful secondary ray trajectories can be identified through the system. One of the four possible configurations of this type of scanner is considered in this study. Dimensions and characteristics of the secondary scan patterns are pointed out, in comparison to the "main" scan pattern, generated when pure refraction is considered throughout the prisms. Simulations, as well as experiments are carried out.

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The α‐β circular scanning with large range and low noise

Cited by 9 publications

References 17 publications

3D microscopy in industrial measurements

3D microscopy in industrial measurements

Adaptive velocity‐dependent proportional‐integral controller for high‐speed atomic force microscopy

Experimental versus simulated secondary scan patterns produced by a pair of Risley prisms

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