Theoretical analysis of damping effects of SAW at soud/fluid interfaces

Ballandras, S.; Reinhardt, A.; Khelif, A.; Wilm, M.; Laude, V.; Daniau, W.; Blondeau-Pâtissier, Virginie; Boireau, W.

doi:10.1109/freq.2003.1275211

Cited by 1 publication

(1 citation statement)

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“…In the real case, damping effects occur due to viscosity which significantly reduces Love wave device dynamics. A model has been developed to address this problem [14-16]. It has been shown that the deposition of thick SiO 2 layers onto (AT,Z) cut significantly modifies the acousto-electric properties of surface guided shear waves [5,13].…”

Section: Theory and Mass Sensitivity Measurementsmentioning

confidence: 99%

Integrated Love Wave Device Dedicated to Biomolecular Interactions Measurements in Aqueous Media

Blondeau-Pâtissier

Boireau

Cavallier

et al. 2007

Sensors

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Mass-sensitive electro-acoustic devices such as surface acoustic wave (SAW) micro-balances, capable to operate with aqueous media are particularly favorable for the development of biosensors. Their dimensions and physical properties offer a large potential in biological fluid investigations, especially for measuring physical phenomenon (mass deposition, adsorption, pressure…). In this work, we propose a specific grating configuration to lower the influence of viscosity of fluids which reduces the signal dynamics of the surface wave transducers. A dedicated liquid cell also has been developed to isolate the electro-active part of the device. The fabrication of the cell is achieved using theSU-8™ photo-resist, allowing for manufacturing thick structures preventing any contact between the tested liquids and the transducers. Furthermore, the sensing area has been optimized to optimize the sensor gravimetric sensitivity. The operation of the sensor is illustrated by detecting bovine serum albumin (BSA) adsorption in the sensing area.

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Section: Theory and Mass Sensitivity Measurementsmentioning

confidence: 99%