2011
DOI: 10.1088/0022-3727/44/38/385302
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Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles

Abstract: Abstract. The microstructural features of amorphous TiO2 thin films grown by the electron beam physical vapour deposition technique at oblique angles have been experimentally and theoretically studied. The microstructural features of the deposited films were characterized by considering both, the column tilt angle and the increase of the column thickness with height. A Monte Carlo model of the film growth has been developed that takes into account surface shadowing, short-range interaction between the depositi… Show more

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Cited by 49 publications
(44 citation statements)
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“…Deposition was carried out at room temperature and stoichiometric columnar layers of TiO 2 were obtained by performing the evaporation in 10 −4 torrs of O 2 and placing the substrates at a glancing zenithal angle ˛ = 70 • . These glancing geometries produce films with a tilted columnar microstructure [43]. The layer thickness was controlled by monitoring the evaporation process with a quartz crystal monitor previously calibrated by comparing its response with the thickness of several individual films of TiO 2 .…”
Section: Methodsmentioning
confidence: 99%
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“…Deposition was carried out at room temperature and stoichiometric columnar layers of TiO 2 were obtained by performing the evaporation in 10 −4 torrs of O 2 and placing the substrates at a glancing zenithal angle ˛ = 70 • . These glancing geometries produce films with a tilted columnar microstructure [43]. The layer thickness was controlled by monitoring the evaporation process with a quartz crystal monitor previously calibrated by comparing its response with the thickness of several individual films of TiO 2 .…”
Section: Methodsmentioning
confidence: 99%
“…This geometry leads to the formation of a very open and porous microstructure formed by continuous tilted nanocolumns extending from the substrate up to the surface. The tilting angle of the nanocolumns and the amount of free space in the film can be tuned by controlling the deposition angle ˛ [43]. Zig-zag morphologies can be obtained by turning the substrates around the azimuthal angle (ϕ) during the deposition process [44].…”
Section: Morphology and Structure Of Tio 2 Photoanodesmentioning
confidence: 99%
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“…[16][17][18][19] In contrast with the classical parallel configuration, well known for producing compact layers, the oblique angle geometry promotes shadowing processes of vapor atoms onto the film surface, and facilitates the growth of different tilted nanocolumnar and porous arrays, just like in typical e-beam assisted evaporation at oblique angles. [14,20] However, the presence of a plasma in MS-OAD may introduce further versatility and affect the nanostructural development of the deposited materials. [21] In ref.…”
Section: Introductionmentioning
confidence: 99%
“…TiO 2 and Fe doped TiO 2 thin films were deposited by different methods, such as sol-gel process [9], chemical spray pyrolysis [10,11], sputtering [12], hydrothermal technique [13], reactive pulsed laser deposition [14] and electron beam physical vapour deposition [15]. Among which spray pyrolysis offers a number of advantages over other deposition processes, such as scalability of the process, cost-effectiveness, easiness of doping, operation at moderate temperatures and large uniform surface area.…”
Section: Introductionmentioning
confidence: 99%