Theoretical and experimental investigation of optical modes in oxide-confined and proton-implanted VCSELs incorporating two-dimensional photonic crystal

Abstract

Theoretically investigated oxide-confined and proton-implanted VCSELs with incorporated single-mode defect waveguide in a two-dimensional photonic crystal. It had shown, that such defect establishes single-mode conditions in proton-implanted VCSELs omitting the gain-guidance taking place in these lasers, but same effect can be achieved in oxide-confined VCSELs with oxide layer in anti-node position. In order to check theoretical data, we fabricated a group of proton-implanted VCSELs with two-dimensional photonic crystal, but the photonic crystal did not created singlemode in practical case, probably, because of small etching depth. Experimental researches in process up to now.