Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy

Pi, Mingquan; Huang, Yijun; Zhao, Huan; Peng, Zhimin; Lang, Jiaming; Ji, Jialin; Teng, Ling; Song, Fang; Liang, Lei; Zheng, Cheng; Wang, Yiding; Tittel, Frank K.

doi:10.1016/j.snb.2022.131782

Cited by 21 publications

(22 citation statements)

References 35 publications

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“…However, only the noise from the detector is considered, which influences the accuracy of theoretical analysis. In our previous work, we used the actual measured system noise to theoretically analyze the performance of the ChG waveguide sensor based on wavelength modulation spectroscopy, and the simulation results were consistent with the experimental results 19 …”

Section: Introductionsupporting

confidence: 54%

“…The absorbance fluctuation noise detected by the waveguide sensing system in our previous work is 8.96 × 10 –4 and the corresponding C = 40%, 21 which is used for calculating the LoD. For a linear sensor system, the LoD can be calculated as 19

\mathrm{LoD}=C/\mathrm{SNR},

where SNR is the signal‐to‐noise ratio of absorbance at the concentration of C .…”

Section: Sensing Performancementioning

confidence: 99%

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Theoretical research of chalcogenide waveguide CH₄ sensor based on lift‐off method

Liu

Zheng

2023

Micro & Optical Tech Letters

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Chalcogenide (ChG) waveguide gas sensor with good application prospect at mid-infrared band can be fabricated by the lift-off method with a simple process. However, the inclined sidewalls of the core layer caused by lift-off are unavoidable. The TE and TM mode ChG rectangular waveguides were optimized and the influence of inclined angle on the sensing performance was studied. The performance of TE mode ChG waveguide is more affected by the fabrication error of the inclined angle. The relative variation of the external confinement factor and limit of detection of the TM mode waveguide are 10 and 23 times smaller than that of the TE mode waveguide. This work provides guidance for the design, fabrication, and application of the ChG waveguide gas sensors fabricated by the lift-off method.

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Section: Introductionsupporting

confidence: 54%

\mathrm{LoD}=C/\mathrm{SNR},

where SNR is the signal‐to‐noise ratio of absorbance at the concentration of C .…”

Section: Sensing Performancementioning

confidence: 99%

Theoretical research of chalcogenide waveguide CH₄ sensor based on lift‐off method

Liu

Zheng

2023

Micro & Optical Tech Letters

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“…The laser frequency is modulated by a high-frequency sine wave signal-modulated scanning signal with an angular frequency of

. The instantaneous laser frequency is:

where

is the frequency of the scanned signal and β is the amplitude of the frequency change of the sinusoidal modulation, which we define as the modulation factor as the ratio of its half-height width

to that of the absorption peak ( Zheng et al, 2019 ; Pi et al, 2022 ):

…”

Section: Sensor Detection Theorymentioning

confidence: 99%

“…where v(t) is the frequency of the scanned signal and β is the amplitude of the frequency change of the sinusoidal modulation, which we define as the modulation factor as the ratio of its halfheight width Δv to that of the absorption peak (Zheng et al, 2019;Pi et al, 2022):…”

Section: Wms Principlementioning

confidence: 99%

Performance of a Mid-Infrared Sensor for Simultaneous Trace Detection of Atmospheric CO and N2O Based on PSO-KELM

Zhang

et al. 2022

Front. Chem.

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In this article, a field deployable sensor was developed using a self-developed 4.58-µm continuous wave quantum cascade laser (CW-QCL) for the simultaneous detection of carbon monoxide (CO) and nitrous oxide (N2O), both of which have strong fundamental absorption bands in this waveband. The sensor is based on tunable diode laser absorption spectroscopy (TDLAS) technology, which combined a multi-pass gas cell (MPGC) with a 41 m optical path length to achieve high-precision detection. Meanwhile, the particle swarm optimization-kernel extreme learning machine (PSO-KELM) algorithm was applied for CO and N2O concentration prediction. In addition, the self-designed board-level QCL driver circuit and harmonic signal demodulation circuit reduce the sensor cost and size. A series of validation experiments were conducted to verify the sensor performance, and experiments showed that the concentration prediction results of the PSO-KELM algorithm are better than those of the commonly used back propagation (BP) neural networks and partial least regression (PLS), with the smallest root mean square error (RMSE) and linear correlation coefficient closest to 1, which improves the detection precision of the sensor. The limit of detection (LoD) was assessed to be 0.25 parts per billion (ppb) for CO and 0.27 ppb for N2O at the averaging time of 24 and 38 s. Field deployment of the sensor was reported for simultaneous detection of CO and N2O in the air.

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“…Because the variation of r affects N eff , the influence of r on N eff and γ is studied. γ can be obtained by multiplying group index n g and the energy density of the electric field in the upper cladding layer 16 …”

Section: Optimization Of Pedestal Waveguidementioning

confidence: 99%

Theoretical research of chalcogenide pedestal waveguide gas sensor

Liu

Zheng

2022

Micro & Optical Tech Letters

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A rectangular waveguide with a small external confinement factor (γ) limits the gas sensing performance. The fabrication process of a suspended waveguide with large γ is complex. Pedestal waveguide can be fabricated by wet etching on the basis of a rectangular waveguide, which makes full use of the target analyte area under the core layer and increases γ. The TM mode chalcogenide pedestal waveguide was optimized to obtain a large γ. The γ of the optimized TM mode pedestal waveguide is 55.7% and the limit of detection of methane (CH 4 ) for a 1 cm-long waveguide is 1.67%. The fabrication tolerance of the pedestal waveguide was analyzed. The pedestal radius error has a great influence on sensing performance. This work provides a method for the design and performance analysis of a pedestal waveguide sensor.

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Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy

Cited by 21 publications

References 35 publications

Theoretical research of chalcogenide waveguide CH₄ sensor based on lift‐off method

Theoretical research of chalcogenide waveguide CH₄ sensor based on lift‐off method

Performance of a Mid-Infrared Sensor for Simultaneous Trace Detection of Atmospheric CO and N2O Based on PSO-KELM

Theoretical research of chalcogenide pedestal waveguide gas sensor

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Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy

Cited by 21 publications

References 35 publications

Theoretical research of chalcogenide waveguide CH4 sensor based on lift‐off method

Theoretical research of chalcogenide waveguide CH4 sensor based on lift‐off method

Performance of a Mid-Infrared Sensor for Simultaneous Trace Detection of Atmospheric CO and N2O Based on PSO-KELM

Theoretical research of chalcogenide pedestal waveguide gas sensor

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Theoretical research of chalcogenide waveguide CH₄ sensor based on lift‐off method

Theoretical research of chalcogenide waveguide CH₄ sensor based on lift‐off method