Theoretical and experimental investigations of the electromagnetic field within a planar coil, inductively coupled RF plasma source

Abstract

This paper describes theoretical and experimental investigations of the electromagnetic field within a planar coil, inductively coupled RF plasma source. Theoretical expressions are derived for the spatial distributions of the RF magnetic field within the reactor chamber, both for the situation in which no plasma is generated and for the situation in which an H-mode discharge exists. Detailed measurements of the RF magnetic field and the electron number density and temperature for one particular set of working conditions are reported. These are analysed, with the aid of the theory, to investigate how well the properties of the plasma can be inferred from the magnetic field data, and vice versa. It is concluded that, to within a factor of about two, useful information concerning these quantities can be deduced.

Electrical characterization of an inductively coupled gaseous electronics conference reference cell

“…It is known that the Poynting vector ͑E ជ ϫ B ជ ͒ gives the direction and the average energy transfer by an EM field per unit time, per unit area in an inductive discharge. 8,35 The typical planar induction coil excites ͕B r , B , B z ͖ and ͕E r , E , E z ͖ ͑radial, azimuthal, and axial͒ magnetic and electric field components, respectively. 8,16,19 These fields are basically complex quantities, and inclusion of the phase relation among them will be quite complicated.…”

“…[3][4][5][6][7] In addition, hysteresis effects were observed meaning that the transition from the E mode to the H mode occurs under different conditions, e.g., electron density, supplied power ͓antenna current and antenna voltage ͑V c ͔͒ than the reverse transition from the H mode to the E mode. 2,7,8 Several attempts have been made to measure the electrical and plasma characteristics of inductive discharges. [7][8][9][10][11][12][13][14] These parameters were obtained for different reactor configurations, of different sizes, operational under different gas types and pressures, at different driving frequencies.…”

“…2,7,8 Several attempts have been made to measure the electrical and plasma characteristics of inductive discharges. [7][8][9][10][11][12][13][14] These parameters were obtained for different reactor configurations, of different sizes, operational under different gas types and pressures, at different driving frequencies. To propose an ICP scaling law based on these measurements is difficult because its characteristics are device specific.…”

“…8,15 Often a pure H mode operation is also preferred under plasma proa͒ Author to whom correspondence should be addressed. Electronic mail: sh.v.singh@gmail.com.…”

“…7,13,14 The electrical characterization of the antenna parameters ͑namely, I c and V c ͒ is often implemented into electrotechnical models, such as transformer model. 2,8,15 In this model, the power coupling in a pure H mode is described on the basis of transformer activity between the antenna ͑primary͒ coil and the assumed one-turn plasma ͑secondary͒ coil. The antenna current along with the plasma parameters, such as electron density and temperature, have been used to study the electron kinetics of ICP, and particularly of the H mode.…”