Theoretical and experimental investigations on rotary ultrasonic surface micro-machining of brittle materials

Li, Yunze; Zhang, Dongzhe; Wang, Hui; Ye, Gaihua; He, Rui; Cong, Weilong

doi:10.1016/j.ultsonch.2022.106162

Cited by 15 publications

(6 citation statements)

References 57 publications

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“…Methods for preparing surface texture by shot peening (A), 26 ultrasonic vibration assisted (B), 27 LIGA (C), 28 reactive ion etching (D), 29 and laser processing (E) 30 …”

Section: Preparation Methods Of Bionic Ceramicsmentioning

confidence: 99%

“…30,173 In order to improve the processing efficiency and quality of ceramic materials, ultrasonic-assisted and laser-assisted processing technologies have been proposed to prepare surface textures by combining ultrasonic vibration, laser irradiation and machining processes. 176 Therefore, ultrasonic vibration assistance (Figure 13b) 27,177 and laser-assisted machining technology (milling, turning, planning, grinding) are widely used in the processing of various ceramic materials. 176 Mechanical processing has the advantages of F I G U R E 1 3 Methods for preparing surface texture by shot peening (A), 26 ultrasonic vibration assisted (B), 27 LIGA (C), 28 reactive ion etching (D), 29 and laser processing (E).…”

Section: Machining Methods Of Surface Texture Ceramicsmentioning

confidence: 99%

“…176 Therefore, ultrasonic vibration assistance (Figure 13b) 27,177 and laser-assisted machining technology (milling, turning, planning, grinding) are widely used in the processing of various ceramic materials. 176 Mechanical processing has the advantages of F I G U R E 1 3 Methods for preparing surface texture by shot peening (A), 26 ultrasonic vibration assisted (B), 27 LIGA (C), 28 reactive ion etching (D), 29 and laser processing (E). 30 high processing efficiency and wide application range, but it requires high processing equipment and tools.…”

Section: Machining Methods Of Surface Texture Ceramicsmentioning

confidence: 99%

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Research and application of biomimetic modified ceramics and ceramic composites: A review

Li,

Guo,

Huang

et al. 2023

J Am Ceram Soc.

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Ceramic materials are widely used in engineering field because of their good physical and chemical properties. The poor mechanical properties of traditional ceramics seriously limit the development of ceramic materials and have attracted extensive attention since its birth. The development of high toughness, light weight, and functional ceramic materials has long been the pursuit of materials scientists. Since ancient times, nature has been the source of all kinds of human technological ideas, engineering principles, and major inventions. The functional structure of biology provides a good research object for the bionic design and preparation of ceramic materials. Therefore, it is necessary to summarize the functional structures and mechanisms in nature and biomimetic preparation technology. The purpose of this review is to provide guidance for the functionalized biomimetic design and efficient preparation of ceramic materials. Some typical functional examples in nature are introduced in detail, and several representative biomimetic preparation methods are listed. Finally, the performance and application status of biomimetic ceramics are summarized, and the future development direction of biomimetic ceramic materials is prospected.

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“…Methods for preparing surface texture by shot peening (A), 26 ultrasonic vibration assisted (B), 27 LIGA (C), 28 reactive ion etching (D), 29 and laser processing (E) 30 …”

Section: Preparation Methods Of Bionic Ceramicsmentioning

confidence: 99%

Section: Machining Methods Of Surface Texture Ceramicsmentioning

confidence: 99%

Section: Machining Methods Of Surface Texture Ceramicsmentioning

confidence: 99%

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Research and application of biomimetic modified ceramics and ceramic composites: A review

Li,

Guo,

Huang

et al. 2023

J Am Ceram Soc.

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“…Ultrasonic processing technology has the advantages of reducing cutting forces and heat, decreasing tool wear, optimizing chip morphology, improving surface quality, reducing subsurface damage, improving machining efficiency, etc. It has been widely applied to titanium alloys [1][2][3][4], high-temperature alloys [5][6][7][8], semiconductor wafers [9][10][11][12], engineering ceramics [13][14][15], ceramic matrix * Author to whom any correspondence should be addressed. composites [16,17], and honeycomb composites [18][19][20][21] and other difficult-to-process materials.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the equivalent circuit and performance of an ultrasonic transducer under a force load

Rao,

Shi,

et al. 2023

Smart Mater. Struct.

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In ultrasonic processing technology applications, the force load can cause a drift in the resonance frequency of the ultrasonic transducer and significantly reduce its mechanical quality factor. The traditional equivalent circuit of an ultrasonic transducer can only be used to calculate performance parameters without a force load but not with a force load. Based on Mason’s equivalent circuit, a new equivalent circuit for ultrasonic transducers under a force load is derived while considering the effects of the force load on the material parameters and various types of losses in piezoelectric ceramics. Furthermore, performance parameters are analyzed, such as the resonance frequency, effective electromechanical coupling coefficient, and mechanical quality factor. The ultrasonic transducer sample is produced and the experimental platform is constructed for applying force loads on the ultrasonic transducer. The theoretical model is verified by static loading on the ultrasonic transducer. The proposed equivalent circuit provides theoretical guidance for tracking the exact resonance frequency and performance parameters of force-loading ultrasonic transducers.

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“…The development of RUM machine tools also gradually tends to high speed, multiple axes, and systematization, improving the machining accuracy and efficiency and overcoming the problems of excessive cutting forces, severe tool wear, and the surface loss of workpiece materials triggered by traditional machining. Much of the research has confirmed that spindle speed is one of the critical factors affecting the accuracy of the RUM of hard and brittle materials [ 23 , 24 , 25 , 26 , 27 , 28 , 29 ]. If the spindle speed can effectively increase, it will improve RUM’s processing quality and efficiency for hard and brittle material microstructure.…”

Section: Introductionmentioning

confidence: 99%

Design of a High-Speed Rotary Ultrasonic Machining Machine Tool for Machining Microstructure of Brittle Materials

Zhang,

Gong,

Lian

et al. 2023

Micromachines

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Aiming at the problems of low machining accuracy and more serious tool wear in the traditional diamond grinding machining (DGM) microstructure of hard and brittle materials, this paper proposes high-speed rotary ultrasonic machining (HRUM) technology and develops a HRUM machine tool. The hardware part of the machine tool mainly includes the spindle module, micro-motion system module, ultrasonic machining tank module, and data acquisition (DAQ) system module. The LabView-based controlled machining control system, including motion selection, initialization, coarse tool setting, constant force tool setting, control machining, and coordinate display module, is developed. Comparative experimental research of the HRUM and DGM of small holes in Al2O3 ceramics is carried out in the developed HRUM machine tool. The results demonstrate that HRUM effectively reduces axial cutting forces, reduces binder adhesion, and suppresses slippage while improving tool-cutting ability and extending tool life compared to DGM under the same machining parameters. This technology has essential research significance for the high-precision and efficient machining of microstructures in hard and brittle materials.

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Theoretical and experimental investigations on rotary ultrasonic surface micro-machining of brittle materials

Cited by 15 publications

References 57 publications

Research and application of biomimetic modified ceramics and ceramic composites: A review

Research and application of biomimetic modified ceramics and ceramic composites: A review

Investigation of the equivalent circuit and performance of an ultrasonic transducer under a force load

Design of a High-Speed Rotary Ultrasonic Machining Machine Tool for Machining Microstructure of Brittle Materials

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