2011
DOI: 10.1364/josab.28.001711
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Theoretical and experimental study of a 30 nm metallic slot array

Abstract: We present the simulation, fabrication, and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm). According to the simulation, the experimental measured spectrum of the structure exhibits a dip in the near-infrared region. Moreover, the finite-difference time-domain simulation shows that this device can be used as a sensor, due to its high sensitivity to the refractive index variation of the medium above and inside the cavity (η ¼ Δλ=Δn ¼ 750 nm=refractiv… Show more

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Cited by 9 publications
(7 citation statements)
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“…Previous studies of this variety of nanostructures were done by Dionne et al [10] and Veronis and Fan [11] who provided a new in-sight on subwavelength slots and generation of plasmonic guidance in a few tens of nanometers in metal-insulator-metal (MIM) cavities [12]. In a previous work [13], we have shown theoretically and experimentally how the geometrical parameters of this structure affect the behavior of light in the cavity. Moreover we have proved theoretically the potential application to refractive index sensing of this device.…”
Section: Designmentioning
confidence: 93%
“…Previous studies of this variety of nanostructures were done by Dionne et al [10] and Veronis and Fan [11] who provided a new in-sight on subwavelength slots and generation of plasmonic guidance in a few tens of nanometers in metal-insulator-metal (MIM) cavities [12]. In a previous work [13], we have shown theoretically and experimentally how the geometrical parameters of this structure affect the behavior of light in the cavity. Moreover we have proved theoretically the potential application to refractive index sensing of this device.…”
Section: Designmentioning
confidence: 93%
“…Furthermore, disk or ring resonators have shown promising results in terms of sensitivity [around 600 nm∕RIU (refractive index unit)], with the advantage of planar integration on chips [12,13]. Since a high field localization has been demonstrated in the narrow dielectric region of the metal/ dielectric/metal aperture [14] and thanks to our recent result obtained with slot waveguide cavity [15], we propose here to investigate the behavior of the electromagnetic field inside coaxial apertures when illuminated in-plane. It appears as a combination of high transmission and planar optics with strong field localization, which should provide a high sensitivity associated to a local interaction with the measured medium.…”
mentioning
confidence: 93%
“…In this paper we propose a geometry, based on a plasmonic slot waveguide cavity, that enables a significant improvement of highly multiplexed detection on an integrated silicon platform [4,5]. Due to the large enhancement of the electromagnetic field by the SPP, the sensing volume is highly reduced, which allows localized detection of molecules in sub-attoliter volumes.…”
Section: Introductionmentioning
confidence: 99%