Theoretical and experimental study of spiral zone plates in aluminum thin film

Козлова, Е. С.; Stafeev, Sergey S.; Подлипнов, В. В.; Fomchenkov, Sergey A.; Kotlyar, V. V.

doi:10.1109/itnt52450.2021.9649231

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Optical Scheme Of Measurements1

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2023

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“…The numerical aperture of this ZP is close to 1. The fabrication of an amplitude ZP using electron lithography technology is simpler than that of a phase ZP [19]. However, the rotation of intensity maxima and its velocity are the same for both amplitude and phase zone plates.…”

Section: Optical Scheme Of Measurementsmentioning

confidence: 99%

Optical Sensor Methodology for Measuring Shift, Thickness, Refractive Index and Tilt Angle of Thin Films

et al. 2023

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We propose a simple optical method and device design for the non-contact determination of small shift, thickness, refractive index, and tilt angle of thin films. The proposed sensor consists of a laser light source, a third- or two-order spiral amplitude zone plate with a high numerical aperture, and a CCD camera connected to a computer. It is shown that the third-order zone plate transforms the incident Gaussian beam into a three-petal rotating beam. By measuring the rotation angle of the three-petal intensity distribution, one can measure the following: a minimum shift along the optical axis of about 7 nm (the wavelength is 532 nm), a change in the plate thickness by 3 nm, a change in the tilt angle of the plate by 0.1 degrees, and a change in the refractive index by 0.01.

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Section: Optical Scheme Of Measurementsmentioning

confidence: 99%