The paper presents probabilistic aspects of diagnostics of grinding processes with consideration of metrological aspects of evaluation of topography of machined surfaces and selected problems of assessment of machining accuracy. The processes of creating the geometric structure of the ground surface are described. It was pointed out that the distribution of features important for process diagnostics depends on the mechanism of cumulative effects of random disturbances. Usually, there is a multiplicative mechanism or an additive mechanism of the component vectors of relative displacements of the tool and workpiece. The paper describes a method for determining the classification ability of specific parameters used to evaluate stereometric features of ground surfaces. It is shown that the ability to differentiate the geometric structure of a certain set of surfaces using a selected parameter depends on the geometric mean of the differences in normalized and sorted, consecutive values of this parameter. A methodology is presented for evaluating the ability of various parameters to distinguish different geometric structures of surfaces. Further, on the basis of analyses of a number of grinding processes, a methodology was formulated for proceeding leading to a comprehensive evaluation of machining accuracy and forecasting its results. It was taken into account that in forecasting the accuracy of grinding, it is necessary to determine the deviations, arising under the conditions of multiplicative interaction of the effects of various causes of inaccuracy. Examples are given of processes in which, due to the deformation of the technological system, dependent on the position of the zone and machining force, varying temperature fields and tool wear, the distributions of dimensional deviations are not the realization of stationary processes. It was emphasized that on the basis of the characteristics of the dispersion of the deviation value in the sum set of elements, it is not possible to infer its causes. Only the determination of the “instantaneous” values of the deviation dispersion parameters allows a more complete diagnosis of the process.