Theoretical Prediction of Experimental Jump and Pull-In Dynamics in a MEMS Sensor

Abstract

The present research study deals with an electrically actuated MEMS device. An experimental investigation is performed, via frequency sweeps in a neighbourhood of the first natural frequency. Resonant behavior is explored, with special attention devoted to jump and pull-in dynamics. A theoretical single degree-of-freedom spring-mass model is derived. Classical numerical simulations are observed to properly predict the main nonlinear features. Nevertheless, some discrepancies arise, which are particularly visible in the resonant branch. They mainly concern the practical range of existence of each attractor and the final outcome after its disappearance. These differences are likely due to disturbances, which are unavoidable in practice, but have not been included in the model. To take disturbances into account, in addition to the classical local investigations, we consider the global dynamics and explore the robustness of the obtained results by performing a dynamical integrity analysis. Our aim is that of developing an applicable confident estimate of the system response. Integrity profiles and integrity charts are built to detect the parameter range where reliability is practically strong and where it becomes weak. Integrity curves exactly follow the experimental data. They inform about the practical range of actuality. We discuss the combined use of integrity charts in the engineering design. Although we refer to a particular case-study, the approach is very general.

Non linear response and optimization of a new z-axis resonant micro-accelerometer

“…The non-linear dynamic behavior can therefore lead to jump phenomena and instabilities like the dynamic pull-in (see [17] , [18] and [19] ) which are critical for the accelerometer functioning.…”

Smart Gas Sensing and Actuation Using Multimode of a MOFs Coated Microbeam

“…4c, when operating the resonator in the linear regime, a concentration of 3260 ppm shifts the first mode frequency by 1.78 kHz and the third mode by 2.455 kHz. To experimentally demonstrate the concept of smart switching, we fix the first source frequency at Ω1=68 kHz (first mode) and voltage amplitude VAC1 = 50 V, the second source frequency at Ω2=344 kHz (third mode) and voltage amplitude VAC2 = 40 V, and use VDC = 30 V. Ruzziconi et al [21] demonstrated that the stability of the resonator at a particular operating frequency depends on the size of the safe basin of attraction. As the driving frequency approaches the bifurcation frequency, the safe basin of attraction gets eroded and shrinks in size.…”

A Stepped Frequency Sweeping Method for Nonlinearity Measurement of Microresonators

“…However, when the vibration amplitude is close to or even located in the nonlinear region, instability caused by nonlinear effects will emerge and the overall sensor performance will be decreased [3,4]. Therefore, studies on the nonlinear dynamics of microresonators have been a research hot spot in recent years [5,6,7,8]. Obtaining the nonlinear dynamics by experimental methods will not only benefit in operating circuit configuration for the manufactured microsensors, but also provide guidance for future resonator design optimization.…”

“…Obtaining the nonlinear dynamics by experimental methods will not only benefit in operating circuit configuration for the manufactured microsensors, but also provide guidance for future resonator design optimization. Furthermore, experimentally obtained nonlinear dynamic parameters provide reliable support for realizing the parameter resonance of microresonators employing the nonlinear characteristics [5,6,7,8]. …”