Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

Abstract

The resonance frequency,fs, and the effective electromechanical coupling factor,keff2, of thin film bulk acoustic resonators (FBARs) are derived by transfer matrix method. The effects of thickness and density of electrode onfsandkeff2with different piezoelectric layers are investigated by numerical calculation method. The results show that thickness and density of electrode affectfsobviously, especially in large thickness and density area. Moreover, the effects of thickness, density, and acoustic velocity of electrode onkeff2of FBAR were also studied. The results show that there is a maximumkeff2corresponding to the composition of thickness and density of electrode which is about 20% over the original electromechanical factor of piezoelectric film.keff2is in the direct proportion to the densityρeandveof electrode, respectively. The electrode thickness affectskeff2small with highve; moreover, whenveis high enough, thenkeff2has almost nothing to do withde.keff2always rises with electrode thickness first and then descends with its rising, and the thickness corresponding to the maximumkeff2is different with different electrode, but it always locates in the special area. All above results indicate that the thickness, density, and acoustic velocity of electrode are so important that these results can be applied to design FBAR.

A review of piezoelectric MEMS sensors and actuators for gas detection application

“…Additionally, there are some scholars extensively investigating the capability of the FBAR for several applications such as communication filters [314][315][316][317][318] and chemical detection [257,[319][320][321]. In addition, the researchers are still investigating the FBAR parameters for enhancing the device performance such as the quality factor, coupling coefficient, electromechanical coupling, device geometry, and the figure of merit [261,268,288,[322][323][324][325][326]. For instance, Johar et al [327] have optimized FBAR for toluene detection.…”