“…Moreover, direct measurements of  for the silane radicals have been carried out by means of the various diagnostics mentioned in Sec. I, revealing  values of ϳ0.2-0.3, 6,8,[10][11][12][13]20,25 [40][41][42][43][44] and molecular dynamics simulations, 41,[45][46][47][48] which address the surface reactions at the atomistic scale. For SiH 3 , only indirect information is available about the dependence of  on the substrate temperature from the early study of Matsuda et al 6 This study, though, suffers from the uncertainty that the measured  values are averaged overall plasma species.…”