The reaction mechanism of SiHF radical with HNCO has been investigated by the B3LYP method of density functional theory (DFT), while the geometries and harmonic vibration frequencies of reactants, intermediates, transition states and products have been calculated at the B3LYP/6-311++G** level. To obtain more precise energy result, stationary point energies were calculated at the CCSD(T)/6-311++G**//B3LYP/6-311++G** level. In temperature range of 100 K to 1900 K, the statistical thermodynamics and Eyring transition state theory with Winger correction are used to study the thermodynamic and kinetic characters of the channel with low energy barrier at 1.0 Atm. SiHF + HNCO → IM 8 → TS 8 → SiFNHCHO ( P 3) was the main channel with low potential energy in the singlet state, SiFNHCHO was the main product. The analyses for the combining interaction between SiHF radical and HNCO with the atom-in-molecules (AIM) theory have been performed. There are three reaction channels in the triplet.