2014
DOI: 10.1088/1009-0630/16/6/08
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Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

Abstract: In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based on the analytical equations and simulation data from a one-dimensional fluid model, an optimal gap between electrodes, at which the largest electron density is obtained, can be observed under a constant power condition; however, as the electrode gap increases the time-averaged electron temperature… Show more

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Cited by 3 publications
(3 citation statements)
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“…Clearly, the form of the effective value is a root mean square (RMS) value. The power density P can be assumed to be P = f T 0 V(t)J 0 (t), where T is a circle [39,40]. The method for calculating effective power density is as the same as that used for effective current.…”
Section: Resultsmentioning
confidence: 99%
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“…Clearly, the form of the effective value is a root mean square (RMS) value. The power density P can be assumed to be P = f T 0 V(t)J 0 (t), where T is a circle [39,40]. The method for calculating effective power density is as the same as that used for effective current.…”
Section: Resultsmentioning
confidence: 99%
“…, where T is a circle [39,40]. The method for calculating effective power density is as the same as that used for…”
Section: Resultsmentioning
confidence: 99%
“…6(a), which suggests that the α-γ mode transition of RF discharge burst happens with a higher voltage and lower current at the duty cycle of 20%, compared to that at the duty cycle of 30%. It can be explained by the few RF cycles (2)(3) in the RF discharge burst with the modulation characteristics in terms of frequency at 900 kHz and duty cycle at 20% [11] . The RF discharge burst operates in the ignition phase, which also explains the stable operation of RF discharge burst in the γ mode at the duty cycle of 20%, as shown in Fig.…”
Section: Fig3 Waveforms Of Applied Voltage and Current During The Ramentioning
confidence: 99%