Theory and design of piezoelectric resonators immune to acceleration: present state of the art

Kosinski, J.A.; Pastore, R.

doi:10.1109/58.949753

Cited by 16 publications

(5 citation statements)

References 98 publications

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“…Stress can be generated, for example, during the film preparation procedure or from clamping the quartz in a measurement cell. Force-related effects have been analysed, for example, in [22].…”

Section: Deviations From the 1d Modelmentioning

confidence: 99%

Transduction mechanism of acoustic-wave based chemical and biochemical sensors

Lücklum

Hauptmann

2003

Meas. Sci. Technol.

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Acoustic-wave-based sensors are commonly known as mass-sensitive devices. However, acoustic chemical and biochemical sensors also face so-called non-gravimetric effects, especially if they work in a liquid environment. The one-dimensional transmission-line model (TLM) is a powerful tool, which considers the influence of geometric and material properties on the sensor transduction mechanism, most importantly the influence of viscoelastic phenomena. This paper demonstrates the concept of modelling acoustic microsensors on quartz crystal resonators. Particular attention is paid to special cases which allow for simplifications or specific solutions of the TLM, like the acoustic load concept (ALC), the BVD model or the Sauerbrey equation. Deviations from the one-dimensional assumption of the TLM are suspected to significantly contribute to the acoustic sensor response in biosystems. We therefore introduce a generalization of the ALC to get access to two-or three-dimensional effects, which are up to now not considered in the TLM. As examples, signatures of interfacial phenomena or non-uniform films are discussed.

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Section: Deviations From the 1d Modelmentioning

confidence: 99%

Transduction mechanism of acoustic-wave based chemical and biochemical sensors

Lücklum

Hauptmann

2003

Meas. Sci. Technol.

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“…This technique may be very useful for planar, higher frequency resonator designs, but in typical lower frequency, low phase-noise designs, the blank geometry is by necessity contoured, and in these cases incremental mass loading changes on the electrode surface have very little influence on the mode shape. Many other authors have discussed practical and theoretical considerations for achieving low acceleration sensitivity, including Kosinsky [13], [14] and Lee [15]. Practical designs were also developed in France from the 1970s onwards in the form of the highly complex BVA structures that utilize quartz bridges in the resonator elements as well as multiple quartz components and conductive structures to provide symmetrical support for the resonator [16], [3].…”

Section: Introductionmentioning

confidence: 99%

The effect of contour concentricity on the acceleration sensitivity of quartz crystal resonators

Morley¹

2015

2015 Joint Conference of the IEEE International Frequency Control Symposium &Amp; The European Frequency and Time Forum

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Optimization of the acceleration sensitivity of quartz crystal resonators has been a challenging problem for resonator designers for decades. The structural symmetry of the resonator and mount combination has been shown in past work, both theoretical and practical, to have a strong influence on acceleration sensitivity, and specialized structures have been developed [1], [2], [3] that have greatly improved performance. However, with applications such as airborne radar systems, there is a persistent demand for further improvement.The design of many of the practical high-stability resonator products that have a need for good acceleration sensitivity is also constrained by other attributes, such as high quality factor, and these constraints typically result in a low-frequency overtone device with a fully contoured resonator element design. In this paper, the effect of the concentricity of the contour shape on the quartz disk in contoured resonators is considered, and results are presented that demonstrate a strong correlation between the contour offset from the blank center and the acceleration sensitivity of the resonator. Methods are also described for measurement of the contour position relative to the perimeter of the disk.

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“…As mentioned above, material nonlinearity is an important factor affecting the sensitivity of the resonators to mechanical vibration [ 4 , 8 , 27 , 28 ]. Since nonlinear elastic constants in crystalline material are anisotropic, the orientation-dependency of the vibration sensitivity due to this nonlinearity is potentially predictable.…”

Section: Introductionmentioning

confidence: 99%

Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators

2018

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Acceleration sensitivity in silicon bulk-extensional mode oscillators is studied in this work, and a correlation between the resonator alignment to different crystalline planes of silicon and the observed acceleration sensitivity is established. It is shown that the oscillator sensitivity to the applied vibration is significantly lower when the silicon-based lateral-extensional mode resonator is aligned to the <110> plane compared to when the same resonator is aligned to <100>. A finite element model is developed that is capable of predicting the resonance frequency variation when a distributed load (i.e., acceleration) is applied to the resonator. Using this model, the orientation-dependent nature of acceleration sensitivity is confirmed, and the effect of material nonlinearity on the acceleration sensitivity is also verified. A thin-film piezoelectric-on-substrate platform is chosen for the implementation of resonators. Approximately, one order of magnitude higher acceleration sensitivity is measured for oscillators built with a resonator aligned to the <100> plane versus those with a resonator aligned to the <110> plane (an average of ~5.66 × 10−8 (1/g) vs. ~3.66 × 10−9 (1/g), respectively, for resonators on a degenerately n-type doped silicon layer).

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Theory and design of piezoelectric resonators immune to acceleration: present state of the art

Cited by 16 publications

References 98 publications

Transduction mechanism of acoustic-wave based chemical and biochemical sensors

Transduction mechanism of acoustic-wave based chemical and biochemical sensors

The effect of contour concentricity on the acceleration sensitivity of quartz crystal resonators

Acceleration Sensitivity in Bulk-Extensional Mode, Silicon-Based MEMS Oscillators

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