2008
DOI: 10.1002/sca.20091
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Theory Experiment Comparison of the Electron Backscattering Factor from Solids at Low Electron Energy (250–5,000 eV)

Abstract: The electron backscattering factor was measured from 24 different elements at low primary beam energy (250-5,000 eV). The results were compared with Monte Carlo simulations from a variety of freely available programs and an in-house developed program. The results suggest that a thin film of oxide can modify the backscattering factor at low primary energy. In addition, a number of problems have been identified with the freely available programs.

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Cited by 73 publications
(57 citation statements)
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“…This article is a continuation of the work reported in a companion paper (El-Gomati et al (2008)). We should like to point out that the title of this companion paper and at various locations within that paper the term ''backscattering factor'' is used erroneously instead of the correct term ''backscattering coefficient.''…”
Section: Introductionmentioning
confidence: 78%
See 1 more Smart Citation
“…This article is a continuation of the work reported in a companion paper (El-Gomati et al (2008)). We should like to point out that the title of this companion paper and at various locations within that paper the term ''backscattering factor'' is used erroneously instead of the correct term ''backscattering coefficient.''…”
Section: Introductionmentioning
confidence: 78%
“…The experiment has already been described in the companion paper (El-Gomati et al (2008)) and can also be found in the theses by Assa'd (1995) and Zadrazil (2002). We direct the reader who wishes to know more about the experimental procedure to these works.…”
Section: Methodsmentioning
confidence: 91%
“…Backscattering simulations are compared with several experimental measurements. [54][55][56][57][58] In order to provide a fair comparison to experimental data, experimental results are only used when the backscattering coefficient measurement covers close to half or all the possible backscattering solid angle. Two curves are shown for each physics model, the first considering backscattered electrons with energies above 50 eV and the next considering those above 125 eV, as the thresholds from the experiment vary between 50-120 eV.…”
Section: Validation Of the New Modelsmentioning
confidence: 99%
“…The results are shown in Fig. 8 along with the measurements of El Gomati et al [31] for Pt. The graph includes also the parameterization of Dapor [32], valid up to 6.7 keV and normal incidence:…”
Section: Backscattering Coefficientmentioning
confidence: 59%