Thermal actuation, a suitable mechanism for high frequency electromechanical resonators

Rahafrooz, Amir; Hajjam, Arash; Tousifar, Babak; Pourkamali, Siavash

doi:10.1109/memsys.2010.5442530

Cited by 41 publications

(23 citation statements)

References 5 publications

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“…This is primarily a result of considerably small thermal time constant of actuators at this scale [6]. In practice achieving periodic actuations with frequencies in order of tens of MHz has been confirmed by researchers [7,8].…”

Section: Introductionmentioning

confidence: 84%

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Komeili¹,

Menon²

2016

Int. j. simul. model.

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Dynamic behaviour of a micro-cantilever beam under periodic electro-thermal loading is studied in this paper. For certain applications the beam is required to vibrate at a particular frequency. Modal analysis using 3D finite element is used in order to find the geometrical parameters that makes fundamental frequency of the beam match the required frequency. Then non-linear dynamic thermoelastic analysis is conducted on the system to analyse the time-history (transient) behaviour of the beam and record its tip displacement. However, due to uncertainties and non-repeatabilities that are inherent properties of the system along with those associated with the manufacturing, final product is likely to have deviations from these estimated values (fundamental frequency and tip displacement). Thus, choosing a nominal (desired) design and studying the deviation in natural frequency and tip displacement via 2 k factorial Design-of-Experiments (DOE), effect of uncertainties on the overall performance of the system is investigated. This allows finding the significance of individual parameters on the overall robustness of the design as well as potential interactions between various parameters. Finally, the expected behaviour of the micro-cantilever and its robustness to design and implementation uncertainties are elaborated and statements for robust design of this system are made.

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Section: Introductionmentioning

confidence: 84%

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Komeili¹,

Menon²

2016

Int. j. simul. model.

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“…An R m of 35 Ω has been achieved at 99.85 MHz, which is at least ten times less than its capacitive and transverse piezoelectric counterparts [3][4][5][6]. Figure 10 shows the resonator frequency shift for input powers higher than 0 dBm, where leakage current increases in sidewall AlN thin layers [11].…”

Section: Fabrication Processmentioning

confidence: 99%

“…Most transduction techniques that have been used to actuate and sense silicon BAW resonators [3][4][5] require a relatively large DC polarization voltage (V p ) to provide sufficient electromechanical coupling required for low motional resistances. Piezoelectric transduction, on the other hand, has the advantage of high electromechanical coupling without requiring V p .…”

Section: Introductionmentioning

confidence: 99%

Tunable silicon bulk acoustic resonators with multi-face AlN transduction

Tabrizian

Ayazi

2011

2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings

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This paper presents tunable width-extensional mode bulk acoustic resonators that are piezoelectrically-actuated and sensed using thin layers of AlN on the sidewalls as well as the top surface. By using both longitudinal and transverse piezoelectric effects of conformally-sputtered AlN layers on sidewalls and top surface of a 20 m thick resonator, a low motional resistance of ~35 Ω was achieved for a 100 MHz silicon resonator operating in air. The motional resistance is improved by at least 10x compared to similar devices with capacitive transduction. Furthermore, it is shown that the resonance frequency of these piezoelectrically-transduced devices can be tuned by varying the electric signal power from 0 to 7 dBm.

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“…The legs also serve as the motion-detection component since their axial strain results in a change in electrical resistance via the piezoresistive effect. (The reader is referred to [46] and [47] for more details regarding device fabrication and the actuation/detection schemes.) This design differs from the previously mentioned devices in that virtually all of the surfaces of the device (disk and legs) move in a tangential direction, i.e., the device engages the surrounding liquid through shearing action only, which is expected to be a more efficient means of fluid-solid interaction [44,45].…”

Section: Introductionmentioning

confidence: 99%

Analytical Modeling of a Novel High- $Q$ Disk Resonator for Liquid-Phase Applications

Sotoudegan

Heinrich

Josse

et al. 2015

J. Microelectromech. Syst.

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Abstract:To overcome the detrimental effects of liquid environments on MEMS resonator performance, the in-fluid vibration of a novel disk resonator supported by two electrothermally-driven legs is investigated through analytical modeling and the effects of the system's geometric/material parameters on the dynamic response are explored. The "all-shear interaction device (ASID)" is based on engaging the surrounding fluid primarily through shearing action. The theory comprises a continuous-system, multi-modal model and a single-degree-of-freedom model, the latter yielding simple formulas for the fundamental-mode resonant characteristics that often furnish excellent estimates to the results based on the more general model. Comparisons between theoretical predictions and previously published liquidphase quality factor (Q) data (silicon devices in heptane) show that the theoretical results capture the observed trends and also give very good quantitative estimates, particularly for the highest-Q devices. Moreover, the highest Q value measured in the earlier study (304) corresponded to a specimen whose disk radius-tothickness ratio was 2.5, a value that compares well with the optimal value of 2.3 predicted by the present model. The insight furnished by the proposed theory is expected to lead to further improvements in ASID design to achieve unprecedented levels of performance for a wide variety of liquid-phase resonator applications.

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Thermal actuation, a suitable mechanism for high frequency electromechanical resonators

Cited by 41 publications

References 5 publications

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Robust Design of Thermally Actuated Micro-Cantilever Using Numerical Simulations

Tunable silicon bulk acoustic resonators with multi-face AlN transduction

Analytical Modeling of a Novel High- $Q$ Disk Resonator for Liquid-Phase Applications

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