“…The properties of acrylic copolymers, such as their photosensitivity [5], thermal stability [6][7][8][9][10][11][12], pattern resolution [9,13], glass transition temperature [14], nanosilica modified [8,[15][16][17], and physical characteristics [18], have been investigated in negative-type photoresists. The T g values of pure poly(methacrylic acid), polystyrene, poly(isobornyl methacrylate), and poly(phenylmaleimide-costyrene) were obtained from literature [19][20][21][22]. However, the preparation and thermal properties of four-component copolymers have not been studied sufficiently.…”