In the process of petrochemical, coal chemical, and pharmaceutical industries, a large amount of azeotrope is usually produced. The traditional method of separating azeotrope consumes a lot of energy. Therefore, it is of great significance to develop a low energy consumption and high efficiency method of separating azeotrope to achieve economic benefits and reduce energy consumption. The use of microwave fields for enhanced distillation processes to separate azeotrope is currently of great interest. In this paper, the mechanism of azeotropic formation is reviewed from three aspects: experimental studies, quantum chemical calculations and molecular simulations, and the influence of cluster structure on azeotropic formation is analyzed. Then the paper discusses the experimental study of microwave‐enhanced distillation process to separate azeotrope and the molecular simulation process, and the mechanism of microwave‐assisted azeotropic separation and the feasibility of industrialization are analyzed. © 2021 Society of Chemical Industry (SCI).