2016
DOI: 10.1166/mex.2016.1272
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Thermal annealing of graphene to remove polymer residues

Abstract: The process of graphene transfer generally involves a polymer support. Thermal annealing of graphene monolayers transferred from Cu to SiO 2 /Si substrate has been investigated to remove polymethyl methacrylate (PMMA) residue. The results show that a clean graphene surface without any deterioration is difficult to obtain by conventional thermal annealing method owing to the reaction between the graphene and the carbon by-products from the residual polymers. Although a higher annealing temperature facilitates r… Show more

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Cited by 56 publications
(40 citation statements)
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“…Figure 1b shows how the presence of these polymer residues will significantly reduce the electron transmission of graphene membranes. Although numerous approaches have been proposed to remove these residues, these are often accompanied by degradation of the graphene, as in the case of annealing treatments which show poor selectivity towards polymer-removal, or simply convert the polymer to amorphous carbon [77,78]. Polymer-free transfer approaches have therefore been developed that completely avoid the use of a support that covers the graphene surface [55,79,80].…”
Section: Graphene Transfermentioning
confidence: 99%
“…Figure 1b shows how the presence of these polymer residues will significantly reduce the electron transmission of graphene membranes. Although numerous approaches have been proposed to remove these residues, these are often accompanied by degradation of the graphene, as in the case of annealing treatments which show poor selectivity towards polymer-removal, or simply convert the polymer to amorphous carbon [77,78]. Polymer-free transfer approaches have therefore been developed that completely avoid the use of a support that covers the graphene surface [55,79,80].…”
Section: Graphene Transfermentioning
confidence: 99%
“…In addition, hydrocarbon impurities are directly absorbed from the atmosphere onto the surface. Their chemical nature is still not precisely known, but most studies point to (‐CH 2 ‐) and (‐CH 3 ‐) groups ; carboxyl, methoxy, and sp 3 ‐hybridized carbon ; and (CO) functional groups . Finally, mobile contamination may be pinned into place by the electron beam .…”
Section: Introductionmentioning
confidence: 99%
“…The similar change of these new bands in the Raman spectrum of PMMA-transferred graphene upon thermal annealing has been previously reported [143,144,146]. These new bands cannot be removed by further increasing the annealing temperature and duration, indicating that a new type of carbon residues is left after the removal of PMMA residue by thermal annealing [144,146].…”
Section: Degradation Of Pmma Residue Upon Thermal Annealingsupporting
confidence: 83%