“…(4) It exists a correlation between the chamber pressure and composition change during deposition. 5,24 The change in vapor pressure during deposition probably turns out to affect heavily the chamber pressure leading to deviate of composition. (5) The melting and evaporation behavior of the source material, ingot density, deposition rate and efficiency, gun power, e-beam focus, dwell time, chamber pressure and vapor cloud geometry are predominant factors to control the coatings' composition during deposition.…”