Thermal Conductivity Measurement of High-k Oxide Thin Films

김인구,; 오은지,; 김용수,; 김석원,; 박인성,; 이원규,

doi:10.5757/jkvs.2010.19.2.141

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2011

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“…For this, various optical techniques are used widely nowadays in the field of heat and mass transfer measurement [1,2]. These methods are non-contact, non-destructive, and it can provide accurate measurement.…”

Section: Introductionmentioning

confidence: 99%

Real Time Temperature Distribution Measurement of a Microheater by Using Off-Axis Digital Holography

Tserendolgor

Baek²,

Kim³

2011

Journal of the Korean Vacuum Society

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We describe a single shot off-axis digital holography based on a Mach-Zehnder interferometic scheme for measuring temperature distribution of a microheater. The proposed scheme has the capability of reconstructing object phase image which is dependent of the temperature distribution in real time. Experimental results shows that there is a moderate linear relationship between the measured phase and temperature in the range of 20 o C to 60 o C. We expect that the proposed system can provide a very reliable and fast solution in various surface temperature distribution measurement applications.

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Section: Introductionmentioning

confidence: 99%