2014
DOI: 10.1063/1.4879242
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Thermal conductivity of silicon nanomeshes: Effects of porosity and roughness

Abstract: We theoretically investigate thermal conductivity in silicon nanomeshes using Monte Carlo simulations of phonon transport. Silicon membranes of 100nm thickness with randomly located pores of 50nm diameter are considered. The effects of material porosity and pore surface roughness are examined. Nanomesh porosity is found to have a strong detrimental effect on thermal conductivity. At room temperature, a porosity of 50% results in ~80% reduction in thermal conductivity. Boundary roughness scattering further degr… Show more

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Cited by 49 publications
(63 citation statements)
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“…where λpp is the average phonon mean-free-path (MFP) of Si. In previous work simulations were carried out to compare and validate the simulator for bulk values of silicon thermal conductivity [24,26,41,43]. In particular we have also shown that our simulator results compare very well with several literature simulation and experimental results for the thermal conductivity versus temperature for pristine bulk Si and porous Si cases [25,26].…”
Section: Appendix: Single Phonon Monte Carlo Methodssupporting
confidence: 73%
See 1 more Smart Citation
“…where λpp is the average phonon mean-free-path (MFP) of Si. In previous work simulations were carried out to compare and validate the simulator for bulk values of silicon thermal conductivity [24,26,41,43]. In particular we have also shown that our simulator results compare very well with several literature simulation and experimental results for the thermal conductivity versus temperature for pristine bulk Si and porous Si cases [25,26].…”
Section: Appendix: Single Phonon Monte Carlo Methodssupporting
confidence: 73%
“…This section gives details about the Monte Carlo approach we employ, its validation, and the assumptions related the scattering term used. Full details can be found in our previous works [24,41] . The simulation process is as follows: The simulation domain of size Lx = 1000 nm × Ly = 500 nm is initialized with a 'Hot' and 'Cold' end, set at TH = 310 K and TC = 290 K respectively.…”
Section: Appendix: Single Phonon Monte Carlo Methodsmentioning
confidence: 99%
“…Monte Carlo simulations for phonons in Si nanomeshes in the diffusive phonon transport limit, and compared the calculated thermal conductivity with experimental data [64]. In general, the experimental measurements showed lower conductivity compared to the semiclassical result, in some cases significantly lower, which demonstrates that indeed coherent effects could be strong.…”
Section: Thermoelectric Properties Of Bulk-size Nanostructured Simentioning
confidence: 99%
“…These are molecular dynamics (MD) [18][19][20][21][22], the Boltzmann Transport Equation (BTE) for phonons using scattering rates based on the single mode relaxation time approximation (SMRTA) [23][24][25][26], the non-equilibrium Green's function (NEGF) method [27][28][29][30][31][32][33], and the Landauer method [34][35][36], and even more simplified semi-analytical methods based on the Casimir formula to describe boundary scattering [37,38].…”
Section: Introductionmentioning
confidence: 99%