2020
DOI: 10.1016/j.solidstatesciences.2019.106105
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Thermal conductivity of thin films of gallium nitride, doped with aluminium, measured with 3ω method

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Cited by 14 publications
(6 citation statements)
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“…Even though the thermal conductivity of bulk and film GaN was extensively investigated over the last decades [12][13][14][15][16][17][18], there were only several reports on thermal conductivity of AlGaN films and AlN/GaN superlattices. Results of the measurements of Al x Ga 1−x N films (with x changing from 0.1 to 0.44) showed that thermal conductivity decreases with increasing amount of Al mass fraction and decreasing film thickness [19][20][21][22][23][24]. Both increase [21,24] and decrease [19] of thermal conductivity with increasing temperature was observed.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Even though the thermal conductivity of bulk and film GaN was extensively investigated over the last decades [12][13][14][15][16][17][18], there were only several reports on thermal conductivity of AlGaN films and AlN/GaN superlattices. Results of the measurements of Al x Ga 1−x N films (with x changing from 0.1 to 0.44) showed that thermal conductivity decreases with increasing amount of Al mass fraction and decreasing film thickness [19][20][21][22][23][24]. Both increase [21,24] and decrease [19] of thermal conductivity with increasing temperature was observed.…”
Section: Introductionmentioning
confidence: 99%
“…Results of the measurements of Al x Ga 1−x N films (with x changing from 0.1 to 0.44) showed that thermal conductivity decreases with increasing amount of Al mass fraction and decreasing film thickness [19][20][21][22][23][24]. Both increase [21,24] and decrease [19] of thermal conductivity with increasing temperature was observed.…”
Section: Introductionmentioning
confidence: 99%
“…Those parameters for AlGaN were obtained with the use of Vegard's law. [35,36] For calculation of TBC, acoustic (AMM) and diffuse mismatch model (DMM) are usually used. [37,38] According to the AMM, [37,39] phonons are plane waves, which propagate through a continuum medium, and they can be reflected on the interface or transmitted through the specular interface.…”
Section: Calculationmentioning
confidence: 99%
“…Recently, both compounds and other ternary derivatives, once again, catched the attention of researchers and this time for their potential thermoelectric applications. However, due to prevalent self-heating in nitride-based devices, ,− performance operation was hampered especially at high temperatures. This was solved through doping as mentioned by Zalewska et al ., wherein by increasing the amount of Al in GaN, the thermal conductivity of the thin film decreased.…”
Section: Introductionmentioning
confidence: 99%