Thermal convective inclinometer using carbon nanotube yarn

Han, Maeum; Bang, Younghwan; Kim, Woojin; Lee, Gil S.; Jung, Daewoong

doi:10.1016/j.mee.2016.11.004

Cited by 11 publications

(10 citation statements)

References 46 publications

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“…Thermal convection-based tilt sensors use the heat transfer caused by natural convection in a sealed space to detect tilting. [22][23][24][25][26][27] The sealed structure is a critical component of the thermal convection sensor which uses gas as a working medium. If an open setup is used in place of a sealed structure and assuming that the tilting of a rapidly moving object is being measured, it would be difficult to heat the moving gas which is flowing in from the outside environment due to the sensor's movement.…”

Section: Operating Principle Of Thermal Convection-based Tilt Sensorsmentioning

confidence: 99%

“…In thermal convection-based tilt sensors, [22][23][24][25][26][27] the sensor detects the flow of thermal from a heat source in its sealed chamber and uses the changing temperature distribution to detect tilting. Therefore, these types of sensor have no solid mass and they are simple to process and manufacture.…”

Section: Introductionmentioning

confidence: 99%

“…As such, thermal convection-based sensors require a sealed space, and an additional packaging process is performed using the micro-electro-mechanical-system (MEMS) process. [22][23][24][25][26][27] In this study, our goal was to develop a tilt sensor with a wide measurement range of ±90°along single-axis, and MEMS technology was used to manufacture a tilt sensor with a wide measurement range that uses the thermal convection principle. In particular, the sealed top chamber was designed in a simple manner with poly(dimethylsiloxane) (PDMS) to minimize external environmental effects, and changes in sensitivity caused by the size of the sealed space and the shape of the heater which affects the thermal convection approach were analyzed.…”

Section: Introductionmentioning

confidence: 99%

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Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

Han

Kim

Kong

et al. 2018

Jpn. J. Appl. Phys.

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This paper reports a micro-electro-mechanical-system (MEMS)-based tilt sensor using air medium. Since the working mechanism of the sensor is the thermal convection in a sealed chamber, structural parameters that can affect thermal convection must be considered to optimize the performance of the sensor. This paper presents the experimental results that were conducted by optimizing several parameters such as the heater geometry, input power and cavity volume. We observed that an increase in the heating power and cavity volume can improve the sensitivity, and heater geometry plays important role in performance of the sensor.

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Section: Operating Principle Of Thermal Convection-based Tilt Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

Han

Kim

Kong

et al. 2018

Jpn. J. Appl. Phys.

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“…Tilt/angle detection: Along with acceleration, convective inertial sensors can also be used as gyroscopes to detect orientation and rotation of devices. These are required in consumer electronics such as digital camera, virtual-reality device, gesture recognition, and joystick [32], [33], [70].…”

Section: Signal Conditioning For Thermal Accelerometersmentioning

confidence: 99%

A review of micromachined thermal accelerometers

Mukherjee¹,

Basu²,

Mandal³

et al. 2017

J. Micromech. Microeng.

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Thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

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“…For example, a robot designer requires a sensor with a rotation range even up to 360° [3]. Micro‐electro mechanical systems (MEMS) tilt sensors have been recently reported that are based on the force balance, optical, liquid pendulum, and other rules [4, 5]. Force balance sensors transform the slight displacement of the pendulum mass by the inductive or capacitive method, into an electric signal, which depends on the tilt.…”

Section: Introductionmentioning

confidence: 99%

Novel liquid‐based linear capacitive inclination micro‐sensor with totally 360° dynamic range

Labibi

Mehran

2019

IET Circuits, Devices & Systems

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A capacitive inclination micro-sensor based on the liquid dielectric has been proposed, analysed, and simulated. The sensor structure is cylindrical and is half filled with the Silicone oil. There are three parallel plate capacitors in the structure of the inclinometer, which are formed between two ends of the cylinder. These capacitors have a common plate on one end, while other plates are formed on other end of the cylinder. The authors introduce C_out as a special function of the structural capacitors such that different external weights on three separate capacitors' values helps obtaining linear and continuous relation for C_out versus inclination angle. Tilt application to the sensor tends to the liquid dielectric movement in the cavity and consequently variations of the structural capacitors. The authors plot analytical expressions of the capacitors and C_out versus tilt angle using MATLAB besides simulating inclinometer by COMSOL multiphysics. Extracted results from analysis and simulation are in good agreements. Proposed inclinometer has sensitivity of 8.011 fF/deg in 0-360° range. Cross-axis sensitivity of the sensor is also surveyed. Some specifications of the proposed micro-inclinometer are wide linear measurement range, high sensitivity, simplicity of the structure, and manufacturing process, which could make it attractive for different applications.

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Thermal convective inclinometer using carbon nanotube yarn

Cited by 11 publications

References 46 publications

Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

A review of micromachined thermal accelerometers

Novel liquid‐based linear capacitive inclination micro‐sensor with totally 360° dynamic range

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