Thermal cycle modeling of electrothermal microactuators

Mayyas, Mohammad; Shiakolas, Panos S.; Lee, Woo Ho; Stephanou, H.E.

doi:10.1016/j.sna.2009.03.015

Cited by 16 publications

(11 citation statements)

References 17 publications

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“…Then, mechanical deformation is the image of the heat distribution based on thermal expansion and material elasticity. Numerous analytical models have been cited in the literature for the electrothermal U-shaped actuator [7]- [13]. An extensive review of these actuators can be found in [6] [14].…”

Section: B Actuator Designmentioning

confidence: 99%

Design optimization of bistable modules electrothermally actuated for digital microrobotics

Hussein

Chalvet

Moal

et al. 2014

2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

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This article deals with the optimization of the main element of a digital microrobot, which is a bistable module. the bistable module consists of curved beams and electrothermal actuators. A design study of the curved beam and the electrothermal actuator is presented in order to achieve the limits in line with miniaturization. Finally, An optimization for the dimensions is proposed respect to microfabrication and elastic limits.

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Section: B Actuator Designmentioning

confidence: 99%

Design optimization of bistable modules electrothermally actuated for digital microrobotics

Hussein

Chalvet

Moal

et al. 2014

2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics

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“…Compared to other types of actuation mechanisms such as electrostatic [8], electromagnetic [9], and piezoelectric [10], electrothermal microactuators work on the thermal expansions of beam structures and have been demonstrated to be compact, stable, and large displacement and force techniques [11,12]. Various electrothermal actuators have been demonstrated up to date in achieving inplane [11,13] and out-of-plane [14][15][16] motion.…”

Section: Introductionmentioning

confidence: 99%

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Zhang

2018

Shock and Vibration

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Comprehensive analysis on the modal characteristics of V-shaped electrothermal microactuators is presented in this paper for the first time. Considering the unique geometric characteristics of the V-shaped beam, that is, two inclined beams supporting a movable shuttle, both the lateral and longitudinal deflections are taken into account in the modal analysis. Boundary and continuity conditions are employed to obtain the frequency equation. Natural frequencies are then obtained by solving the frequency equation. Mode shapes corresponding to their natural frequencies are also calculated analytically. e theoretical modal analysis is verified with the finite element analysis using ANSYS software. Based on the model analysis, this paper further investigates the relationship between natural frequencies and the volume scaling of the V-shaped beam. Finally, comprehensive parametric studies in terms of material properties and structural dimensions are conducted to provide insights and guidance in designing the V-shaped beam electrothermal microactuators.

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“…Numerous electrothermal [11]- [13], [17], [18] and thermomechanical [12], [13], [17], [18] analytical models have been cited in the literature for the U-shaped actuator. On the other side, few studies [18]- [22] are found that have addressed the dynamic response of the U-shaped actuator.…”

Section: Introductionmentioning

confidence: 99%

“…On the other side, few studies [18]- [22] are found that have addressed the dynamic response of the U-shaped actuator.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator

Hussein

Moal

Bourbon

et al. 2015

2015 IEEE International Conference on Advanced Intelligent Mechatronics (AIM)

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The dynamic behavior of a U-shaped electrothermal actuator is investigated in this paper based on experimental findings and FEM simulations. Few previous works are found in the literature that have addressed the dynamic response of Ushaped actuators. A lack of data on the transient displacement of the actuator in the heating and cooling cycles is noted.Experiments are made in order to characterize the dynamic response of the actuator. The actuators are micro-fabricated on doped SOI wafers and the displacement is recorded with a high speed camera. FEM simulations are in good agreement with the experimental findings. Simulations and experiments show that the shape of displacement follows evolution of the temperature distribution inside the actuator. The influence of the dynamic behavior on the control of the actuator is finally discussed.

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Thermal cycle modeling of electrothermal microactuators

Cited by 16 publications

References 17 publications

Design optimization of bistable modules electrothermally actuated for digital microrobotics

Design optimization of bistable modules electrothermally actuated for digital microrobotics

Vibration Modes and Parameter Analysis of V‐Shaped Electrothermal Microactuators

Analysis of the dynamic behavior of a doped silicon U-shaped electrothermal actuator

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