Thermal Decomposition Analysis of Spin-Coated Films of Partly Protected Polyvinylphenol with the <i>t</i>-Butoxycarbonyl Group Using Time-Resolved IR

Tanimura, Sachiko; Kumada, Teruhiko; Ueyama, Akemi; Kobayashi, Junji; Kuramoto, K.

doi:10.1366/0003702971942033

Cited by 3 publications

(3 citation statements)

References 6 publications

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“…The tert -butoxycarbonyl (Boc) group has been used for a long time as the protective group of phenol compounds . Such Boc derivatives can easily be cleaved either by thermal decomposition or in acidic conditions. , Boc-containing PPQs have already been considered as promising candidates as photoimagable dielectrics . The reaction of di- tert -butyl dicarbonate groups with the phenol-containing PPQs was performed in NMP, according to a well-known procedure (Scheme ).…”

Section: Resultsmentioning

confidence: 99%

“…Poly(phenylquinoxaline)s. The tert-butoxycarbonyl (Boc) group has been used for a long time as the protective group of phenol compounds. 30 Such Boc derivatives can easily be cleaved either by thermal decomposition 31 or in acidic conditions. 32,33 Boccontaining PPQs have already been considered as promising candidates as photoimagable dielectrics.…”

Section: Synthesis and Characterization Of Boc-containingmentioning

confidence: 99%

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“Self-Foaming” Poly(phenylquinoxaline)s for the Designing of Macro and Nanoporous Materials

et al. 2008

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This work concerns the investigation of porous poly(phenylquinoxaline)s (PPQ) films. The approach described relies on the in situ generation of foaming agents during the thermal curing of dense thin films of PPQ-containing thermolabile groups. For this purpose, a series of phenol-containing PPQ has been previously synthesized and then modified by grafting thermolabile tert-butyl carbonate groups (Boc) via a reaction involving the phenol groups. Thin dense films obtained by a solution casting method were thermally treated at different temperatures. The morphology of the resulting porous materials, characterized by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), is discussed in relation with the chemical structure of the polymers and to the thermal treatment conditions as well.

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Section: Resultsmentioning

confidence: 99%

Section: Synthesis and Characterization Of Boc-containingmentioning

confidence: 99%

“Self-Foaming” Poly(phenylquinoxaline)s for the Designing of Macro and Nanoporous Materials

et al. 2008

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“…31 One possible explanation for that result could be related to the formation of phenol groups in the course of the Boc deprotection. Indeed, as reported elsewhere, 43,44 carbonate group decomposition is well-known to be catalyzed by acidic media, and in this regard the deprotected phenols are expected to have a sufficient acidic character to play a catalytic role. Another probable source of acidic protons is residual m-cresol present in the polymer.…”

Section: Kinetic Characterizations Of Decompositionmentioning

confidence: 60%

Preparation and Characterization of Nanocellular Poly(phenylquinoxaline) Foams. A New Approach to Nanoporous High-Performance Polymers

et al. 2007

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This work deals with a new strategy for the elaboration of macro- to nanoporous materials. The adopted scheme involves the in-situ generation of foaming agents (CO2 and isobutene) during the thermal treatment of a poly(phenylquinoxaline) (PPQ) film bearing thermolabile (tert-butyloxycarbonyl, i.e., Boc) groups (PPQ-Boc). For this purpose, a bis-diketone monomer having phenolic groups has been first synthesized and polymerized with a bis-diamine monomer. The resulting PPQ was postmodified by introducing Boc groups. After a kinetic and mechanistic study of the Boc thermal decomposition reaction, the influence of different experimental parameters on the final porosity formation has been investigated, such as the foaming temperature which is a key parameter. The porous materials obtained were characterized by different techniques (density, SEM, TEM) in order to determine the cell density as well as the size and morphology of the porous structure. Depending on the thermal treatment conditions, our strategy enables to obtain a wide range of porous materials, from nanoporous (10 nm, 1016 cells/cm3) to macroporous (200−700 nm, 1012 cells/cm3).

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Combinatorial methodologies offer potential for rapid research of photoresist materials and formulations

Lenhart

Jones

Lin

et al. 2002

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Novel technique to enhance etch selectivity of carbon antireflective coating over photoresist based on O 2 / CHF 3 / Ar gas chemistry Novel fabrication technique for 0.1 μm T-shaped gate with i-line negative resist and poly(methylmethacrylate) J. Vac. Sci. Technol. B 17, 320 (1999); 10.1116/1.590558Real-time Fourier transform infrared spectroscopy study of the kinetics of acid-catalyzed negative-tone resists based on hexamethoxymethylmelamine and phenolic resins A combinatorial research methodology is outlined with the potential to investigate material factors in photoresist formulations more rapidly than with traditional experimental design. The approach involves generating a gradient of processing variables in the photoresist film and using a set of analysis tools to ''map'' the photoresist properties as a function of the gradient variables. While high-throughput strategies have proven useful for empirical optimization of photoresist processing conditions, they have not been fully exploited to probe the complex array of material issues in projection lithography. Of primary importance in combinatorial methodologies is the generation of variable gradients. The focus of this article is to illustrate techniques to generate a gradient in bake temperature and bake time in the polymer films, and to illustrate that these gradient techniques can be used to probe fundamental properties of lithographic materials, such as deprotection kinetics. These gradient techniques were applied to rapidly probe the deprotection behavior of a poly͑tertbutyloxy-carbonyloxy-styrene͒. The deprotection data, obtained by applying the combinatorial gradients, agrees well with previous literature, validating the accuracy of these high throughput methods. The advantage of the combinatorial research strategies lies in the potential to investigate fundamental lithographic phenomena more rapidly than with traditional experimentation.

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Thermal Decomposition Analysis of Spin-Coated Films of Partly Protected Polyvinylphenol with the t-Butoxycarbonyl Group Using Time-Resolved IR

Cited by 3 publications

References 6 publications

“Self-Foaming” Poly(phenylquinoxaline)s for the Designing of Macro and Nanoporous Materials

“Self-Foaming” Poly(phenylquinoxaline)s for the Designing of Macro and Nanoporous Materials

Preparation and Characterization of Nanocellular Poly(phenylquinoxaline) Foams. A New Approach to Nanoporous High-Performance Polymers

Combinatorial methodologies offer potential for rapid research of photoresist materials and formulations

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