Thermal diffusivity measurement of micron-thick semiconductor films by mirage detection

Roger, Jean Paul; Lepoutre, F.; Fournier, D.; Boccara, A. C.

doi:10.1016/0040-6090(87)90462-7

Cited by 40 publications

(9 citation statements)

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“…Still another way is to determine the surface temperature as a function of time while heat diffuses from the surface of the sample into the interior. Photothermal radiometry (36, 37) and photothermal deflection schemes (38,39) have demonstrated their utility in this type of noncontact, single ended measurement. Even photoacoustic schemes can be adapted for samples with inaccessible backsides (40) and corrections for the geometry of the cell improve accuracy considerably (41).…”

Section: (9)mentioning

confidence: 99%

Photothermal methods for the measurement of thermal properties of thin polymer films

Coufal

1991

Polymer Engineering & Sci

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The absorption of radiation in a sample gives rise to local heating. With a suitable modulated or pulsed source of radiation, a spatially well defined instantaneous heat source can be readily implemented. Radiation induced thermal transients are, therefore, the ideal heat sources for studies of thermal processes in thin films. Application of this method for measurements of thermal diffusivity and temperature dependent properties of thin polymer films are discussed. Imaging of inhomogeneities and depth profiling are another important area of application for these techniques. A number of applications emphasizing the various photoacoustic and photothermal techniques, their advantages and drawbacks are covered in detail.

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Section: (9)mentioning

confidence: 99%

Photothermal methods for the measurement of thermal properties of thin polymer films

Coufal

1991

Polymer Engineering & Sci

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“…24 The ratio of the conventional and transmission n-PDS signals is then independent of the offset a 0 .…”

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Beam Deflection Photothermal Spectroscopy

Power

2001

Handbook of Vibrational Spectroscopy

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The sections in this article are Introduction Beam Deflection Principles Optical Principles Heat Diffusion Principles Collinear Photothermal Deflection Normal Photothermal Deflection Instrumentation and Measurement Applications

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“…In the case of a thin opaque film deposited on a transparant substrate, the thermal diffusivity can be determined by the relative phase lag between the photothermal signals obtained from the rear and front surface excitations successively [6]. In order to avoid …”

Section: 0mentioning

confidence: 99%

“…For the phase measurement taken in air and the sample in irradiated by an unfocused laser beam, the phase lag of the photothermal signal between rear and front surface excitations has been deduced and written as follows (6] (1) where Rsb is the thermal reflection coefficient at the sample-substrate interface, ds and Ps are the thickness and the thermal wavelength of the sample respectively. es and eb are the thermal effusivities of the sample and the substrate respectively.…”

Section: Preamplifiermentioning

confidence: 99%

“…In this paper, we describe the study of the thermal diffusivity of a series samples of amorphous semiconductor superlattices a-Si:H/a-SiNx:H. The thermal diffusivity of the samples is experimentally measured by using mirage detection technique [5,6]. Up to date, the mirage detection method has been used successfully to determine the thermal diffusi vi ty of bo ~h transparent and opaqc:e materials.…”

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