1985
DOI: 10.1063/1.1138117
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Thermal diffusivity measurement of thin films by means of an ac calorimetric method

Abstract: A new method to measure thermal diffusivity of a thin sample was developed using a light-irradiated ac calorimetric technique. The experimental conditions and the fundamental equations for the measurement are discussed. In principle, this method can be applied no matter how thin a sample may be. This method was tested for samples of nickel, silicon, stainless steel, and alumina in the range from 50 to 300 μm in thickness. The measured thermal diffusivities coincide satisfactorily with the values reported for b… Show more

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Cited by 213 publications
(92 citation statements)
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“…A number of frequency dependent techniques, in which oscillating power is applied to the sample and resulting temperature oscillations measured, have been developed to measure thermal conductivity of small samples. [7][8][9][10][11][12][13][14][15] For these, the power transported out of the sample by leads and radiation determines the "external" thermal time constant,  1 , but measurements are typically made at frequencies  >>1/ 1 , 8 so that heat loss and radiation corrections are negligible.…”
Section: 3mentioning
confidence: 99%
See 1 more Smart Citation
“…A number of frequency dependent techniques, in which oscillating power is applied to the sample and resulting temperature oscillations measured, have been developed to measure thermal conductivity of small samples. [7][8][9][10][11][12][13][14][15] For these, the power transported out of the sample by leads and radiation determines the "external" thermal time constant,  1 , but measurements are typically made at frequencies  >>1/ 1 , 8 so that heat loss and radiation corrections are negligible.…”
Section: 3mentioning
confidence: 99%
“…One disadvantage of the 3 technique is that for a layered, anisotropic crystal the heater's oscillating temperature will be a function of the geometric mean of the "in-plane" and transverse thermal conductivities, 15 so the two components are not separately determined; in addition, it may be difficult to apply a low-noise Joule heater to some organic materials without damaging the material. Alternatively, other investigators have used chopped light to apply oscillating power to one surface of the sample and measured the oscillating temperature at different positions and/or frequencies; [6][7][8][9][10][12][13][14] the frequency dependent response is a function of the thermal diffusivity, D  /c, where c is the specific heat,  the mass density, and  the thermal conductivity. Most commonly, the oscillating temperature is measured on the opposite surface as a function of the lateral distance from the light, either by screening the light from part of the sample [8][9][10]14 or by using a laser to illuminate a small spot.…”
mentioning
confidence: 99%
“…The so-called ac calorimetry technique can measure thermal diffusivity parallel to the broad surface in a thin material [13,14]. In the measurement system, a part of the thin material is shadowed by a mask on the surface, as shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…One of the early attempts in this direction was by Hatta et al [13], who measured thermal diffusivity of thin films by an ac calorimetric method. Measurements were reported in thin films of nickel, silicon, stainless steel, and aluminum with thickness in the range 50 to 300 µ m. However, the dependence of film thickness on thermal diffusivity was not reported in that work.…”
Section: Introductionmentioning
confidence: 99%