Thermal Evaporation Sources

Harsha, K.S. Sree

doi:10.1016/b978-008044699-8/50005-x

Cited by 8 publications

(8 citation statements)

References 58 publications

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“…Through adjusting the oxygen concentration, TiO 2 nanomembranes with different oxidation degrees can be realized. On the one hand, the pressure of the deposition chamber must be lower than 1.5 × 10 –4 mbar in electron beam deposition to allow passage of electrons from the electron gun to the evaporation material; on the other hand, too low oxygen concentration will produce too high oxygen deficiency, which reduces the total number of redox-active Ti 4+ . Therefore, in this work, a rational oxygen pressure of 1.4 × 10 –4 mbar was used to produce TiO 2 layers having rational Ti 3+ and oxygen vacancies throughout the whole product (which are denoted as TiO 2−δ ).…”

Section: Resultsmentioning

confidence: 99%

Tunable Pseudocapacitance in 3D TiO_2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Huang¹,

Lin²,

Lu³

et al. 2016

ACS Nano

129

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Nanostructured TiO2 of different polymorphs, mostly prepared by hydro/solvothermal methods, have been extensively studied for more than a decade as anode materials in lithium ion batteries. Enormous efforts have been devoted to improving the electrical conductivity and lithium ion diffusivity in chemically synthesized TiO2 nanostructures. In this work we demonstrate that 3D Ti3+-self-doped TiO2 (TiO2−δ) nanomembranes, which are prepared by physical vapor deposition combined with strain-released rolled-up technology, have a great potential to address several of the long-standing challenges associated with TiO2 anodes. The intrinsic electrical conductivity of the TiO2 layer can be significantly improved by the in situ generated Ti3+, and the amorphous, thin TiO2 nanomembrane provides a shortened Li+ diffusion pathway. The fabricated material shows a favorable electrochemical reaction mechanism for lithium storage. Further, post-treatments are employed to adjust the Ti3+ concentration and crystallinity degree in TiO2 nanomembranes, providing an opportunity to investigate the important influences of Ti3+ self-doping and amorphous structures on the electrochemical processes. With these experiments, the pseudocapacitance contributions in TiO2 nanomembranes with different crystallinity degree are quantified and verified by an in-depth kinetics analysis. Additionally, an ultrathin metallic Ti layer can be included, which further improves the lithium storage properties of the TiO2, giving rise to the state-of-the-art capacity (200 mAh g–1 at 1 C), excellent rate capability (up to 50 C), and ultralong lifetime (for 5000 cycles at 10 C, with an extraordinary retention of 100%) of TiO2 anodes.

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Section: Resultsmentioning

confidence: 99%

Tunable Pseudocapacitance in 3D TiO_2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Huang¹,

Lin²,

Lu³

et al. 2016

ACS Nano

129

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“…The sample was deposited on a <100> single crystal Si substrate using the Physical Vapour Deposition (PVD) technique. 26 The 99.99% purity solid targets from EVOCHEM GmbH (Offenbach am Main, Germany; Cu) and Testbourne Ltd (Hampshire, England; Zr and Ag) were used in a 3'' sputter magnetron from MANTIS Deposition Ltd (Oxfordshire, United Kingdom). The fabrication conditions are specified in Table S1 (in Supporting Information).…”

Section: Methodsmentioning

confidence: 99%

Fluorine Gas Coinjection as a Solution for Enhancing Spatial Resolution of Time-of-Flight Secondary Ion Mass Spectrometry and Separating Mass Interference

2019

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Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) detectors have been intensively developed in recent decades due to their unprecedented capability of representing a sample elemental composition in a 3-dimensional space from nano-to submili-scale with high spatial resolution and mass resolution. A compact high-vacuum-compatible version of these detectors can be integrated into a Focused Ion Beam (FIB) system which, assembled with Scanning Electron Microscopy (SEM), is the most popular tool used in nanotechnology and material science. This gives a new opportunity for combining TOF-SIMS analysis with other instruments within the same analytical chamber. In this work we present the results of conducting elemental characterization of a dedicated model multilayer sample composed of 100 nm thick thin films of Cu, Zr and ZrCuAg alloy in a fluorine gas atmosphere provided by an in-situ Gas Injection System (GIS). In general, the secondary ion signals were significantly enhanced by up to three orders of magnitude leading to much higher spatial resolution. The quality of elemental images and depth profiles was improved during a single measurement (which usually cannot be obtained at standard vacuum conditions) at high beam energy of 20 keV. Moreover, fluorine assistance has enabled a mass interference between 107 Ag + and 91 Zr 16 O + ions to be separated. This remarkable finding has never been reported before and is expected to play an important role in the future evolution of TOF-SIMS analytical protocols as currently the mass interference between ions remains one of the main drawbacks of the technique.

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“…In this approach post-TOF-SIMS measurements of a crater depth with Atomic Force Microscope (AFM 57 ) or Scanning Electron Microscopy (SEM 58 ) are not necessarily needed. A set of three model samples composed of two metals (ZrAl and ZrCu) and a metal-metalloid (ZrSi) forming alloys were produced using the Physical Vapour Deposition (PVD) 59 . 99.99% purity Al, Si and Zr solid targets from Testbourne Ltd (Hampshire, England) and 99.99% purity Cu solid targets from EVOCHEM (Offenbach am Main, Germany) were used in a 3'' sputter magnetron from MANTIS Deposition Ltd (Oxfordshire, United Kingdom) for depositing the thin films with the thickness in the order of 100 nm on <100> single crystal Si wafers under the conditions summarized in Table 1.…”

Section: Experimental Materialsmentioning

confidence: 99%

The matrix effect in TOF-SIMS analysis of two-element inorganic thin films

Priebe

Xie

Bürki

et al. 2020

J. Anal. At. Spectrom.

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Thermal Evaporation Sources

Cited by 8 publications

References 58 publications

Tunable Pseudocapacitance in 3D TiO_2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Tunable Pseudocapacitance in 3D TiO_2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Fluorine Gas Coinjection as a Solution for Enhancing Spatial Resolution of Time-of-Flight Secondary Ion Mass Spectrometry and Separating Mass Interference

The matrix effect in TOF-SIMS analysis of two-element inorganic thin films

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Thermal Evaporation Sources

Cited by 8 publications

References 58 publications

Tunable Pseudocapacitance in 3D TiO2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Tunable Pseudocapacitance in 3D TiO2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Fluorine Gas Coinjection as a Solution for Enhancing Spatial Resolution of Time-of-Flight Secondary Ion Mass Spectrometry and Separating Mass Interference

The matrix effect in TOF-SIMS analysis of two-element inorganic thin films

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Tunable Pseudocapacitance in 3D TiO_2−δ Nanomembranes Enabling Superior Lithium Storage Performance

Tunable Pseudocapacitance in 3D TiO_2−δ Nanomembranes Enabling Superior Lithium Storage Performance